ࡱ> Root EntryRoot Entry8'FileHeadereDocInfoNHwpSummaryInformation.E BodyText 34PrvImage % PrvTextDocOptions 88Scripts 88JScriptVersion l DefaultJScripti_LinkDocm  !"#$%&'()*+,-./0123456789:;<=>?@ABCDFGHIJKLMOPQRSTUVWXYZ[\]^_`abcdfghjknopqrstuwxyz{|}~ <  COMMODITY DESCRIPTION <1. ԅ><ȐT  )0(E-Beam Evaporator)> <2. ɷ><1 set><3. 1|><2019.11.04> <4. 8 (Specifications)> < . ij -  µ  \ȸ ɉ Ǵ Ҝɤ0X  0 D t LD )XՔ  \֩ -  0  \ t`   0 D \ LD )XՔ  \֩ . DX l1 1) Power Supply 2) E-Beam Source 3) Substrate Unit 4) Ĭ 5) Process Chamber . 1  ܭ 1) Power Supply - Input Power: 208/240, VAC/3, 60Hz - Output Voltage: -6000 to  8000V - Max. Emission Current: 750 mA - H0: DlАǴ x ( \ , Dl  tδ0 $, Dl tδ0 $, Error T8 ȥ0, (ij ( 0, D U/X %  (0  ̸ 0 2) E-Beam Source - Rotatable E-Beam Source - 4 Pocket with 15cc Crucible 3) Substrate Unit - ̸ @T: 4xX t|, 3 t - Rotation 0 Ь(ij p 0) 4) Ĭ - \X ij: < 7.5 x 10-9 torr - 1 Rotary, 1 Turbo Molecular Pump - Pumping Speed: 1100L/sec @Turbo, 600 L/min @Rotary 5) Process Chamber - : SUS304 - Chamber Internal Shield Assembly - Chamber Wall Electro Polishing & Water Cooling Jacket - Viewport ) @Front Door - >GIF89aɻxxxkkk]]]PPPCCC555((( d`LH00`Hذ̘`H0|pdXL@`0H `H0`dHL`H0xp`XH@0d LȰ``HH00dLؘȀ`H0xp`XH@d0L `H0d`LH`H0|pdXL@0`$H`dHL00`HذȘdL0xp`XH@0` HdH0ȳ``HHdL0xp`XH@`0H Ը̰ĠऀؘpȈXxHp@h@d8`8X0xT0pH dxddxd`d`p`|``x`p``x`!, H*\ȰÇ#JHŋ3jȱǏ CIɓ(S\ɲ˗0cʜI͛8sɳϟ@ JѣH*]ʴӧP)*p*Ձe՚u֯QZ:`W`z Z\݂u+YtZK0`c qvp忀LɑXӨz^ͺװc˞Mz;tYKs~Lxk[>yrɰ#ϸղ7{;õكt1ݎɴ5\1ڵ!-ѳKކ!׻Re"'"!≵|2%Ї~bj~hֲpQ/i랋Kmh}욒*,;Z4ƥfꌂ5fӗuU y;:7gW"a}yIf`bDխP0]wC3RNxѫCs5Ѐ*{txMrz!0l!(6 [)ƼǾh?V,_w1J IAR]yc;VJsG6Ӽw[ԛh7AmD# H/Ī~bFȁ~{$-YDBf,䑣|?tY0X=~4f Ss'Kh6{d4a-o4̥'ʭ+D"M,҉/qEɘ^ۜʹpQuPd9{6Q4d;t@6@ȓ7e#6*%4B z⡑։P͔)P%T=JSNKz~LyMnfԁ.T[)SG` XU>7ZJ[M|**x uEXb^HZI'ҫꆯKQ%d"ٞ/lz hGKҚMjWֺlgK[;`a``a`0x0 D    ļ 28 Section0v Administrator2008D 7 29| T֔| $ 9:10:29  ajou-9, 1, 1, 4504 WIN32LEWindows_Unknown_Version@P &sS@3@jQƿIViQB.]TԍPbӢ]A Bh"Eꢸҥ ww&LH2&˝Ls'0ǰ8c8Uel8GZ˩9ODb6Aseml 8π gA(}_nL{ ZV8ͥ*fٚۨV&}z̻G3]Q0&d h4 /H>-0'ԺDZˊe<\ n`iBR+-JL],f٫i\a|8V"F_٘,]A5/;Mj-3տwoXaQrjU9$-\@c=\i72T\ PhlZB9 wZ^Hدg)hfMhzϴߺ 6G7mWU2M+ep47;޵)R"dV۔ {zLg4 =ubdhKKKH sz=5$m~=LA>n8aƜ_v[ bCbbaJ0^, g 8 9$ĂBI(\ar}pĹ͛7sNNI׵4D(R(@n"ԕcְbMOZ7ks\i˟Rsom%Ю1l.YV S(ҖVb*BeB|ys9*eٸ~UvUU. (A:jT*? JGTeS{L))ʩ&EioQ:BjÓ}0eẌ́32s*3_3jеmCpaܥ$ 5sm.$+}}#V9Ϸ`G.0B0# ?: 3J%a}ˀ̚;p ty LP |ne{lJLܟMڈZ影AshjG A z#z>僮,+Y[zEmwk ,GK'4ж̚sͧ< W 5%Y`Khm$C(~ymA8 pp҆w9n7E_|pX{Xx-$,to`;U\x,DFi!I!%$#ֲT_c`k HWP Document Fileu@DO 6C,H,#GB!k0~ 6*7=M*Z:ҙ#?*?ӿT@Y~X+mj3'm[v|:j)%C$Mϼ5#cd߈ 7.5 x 10-9 torr - 1 Rotary, 1 Turbo Molecular Pump - Pumping Speed: 1100L/sec @Turbo, 600 L/min @Rotary 5) Process Chamber - : SUS304 - Chamber Internal Shield Assembly - Chamber Wall Electro Polishing & Water Cooling Jacket - Viewport ) @Front Door - >VOLU[,6kx Zk\ P4 &P$lM{ M i$KԦf@ZÁC{f63emͼf~BГ;_PU3 P3Ѥ8zWyESƔgPucVwH[/&ˀsG>NO*;_._uo,)۲ՠ87ӛ  #QS9x޿#&aq,8 gCmD;ڨ 4jFq,'J_#;3̉ARcar)f:J,L XDm؎qỶ|{^q7Vpƥcz=a\*Me#u5 &MC<0/c2)?[PCJ6;ng u^x oyz C}@D(ؕn?`ljD;M4b7g@,U2&Iƥ̒t_nXpy?d&2!c)bßS j%+o, -̿2pW/FᚈL{WnFV];_jnhi.̱/愜g?sdž'ُu 'ӏzG?Bٺ&#{W0em,K<Paz%pϷ2(3/3\J|Ǽ (_ys5t48[pȞ鳧 s=CZ*TAa|BC+ҫUգZ'1l18G}dq;)hd{duƥgܥGa?pjHMz"G`DrdǨ :~$M8?f[WO8kWl}v&:ۙejl;ٯT;ؑ\֪ 2o6O>g=҅w(A3KfDdTd ]dEit g%s y2(>LK8Fa2{@f~|Ud'f:$ó_V]hU>IIVv @nͦ֠mRPCLii" >}066ز aCDc|ZΙIw6#8Ùsws:kWxMd/ѧ~[AOPṂt*a|Db@wGMueVhfj;ڝY3envYѹ7* 7jiv(ZX|ev1LUMZұDQ#"sg$n5..\S u/}kvIXكx;)z"{;C3SAZwbҕ܎SW(7LW~I= JEj~ZE]:`j\ ֻ@+{?GA7šeLS-CN@8&iaQ F;Ƴ[땈Urib3K_co<僄yȯ=څsE܅L!r$?`AkROi*;fUYvϽ<o,,݇_ -ʳ1~PkyB,?uֹ y Q!%"CȑъK]ilO|mz/ZDW1:ON_d F'L4 Si%+[\FKƌCNS`dB&DE%#.ladYه縭To?_ 92,5o=1;5`R9 W0 iabE)8(ڧuTx SȎݮ S";+0q\q"{=ƶMmI07'ti5>*}MW/6nzثšpLoއxP:!]FaPro,3l,c_WCUƅI Y*E׋Kh&bk[̩쳋8YKZw8tUJP aM{]l@cD2%UlIu2J6lT $ƇYV`ja%Fh/ř&o鷥o  /?t/m=Ew9Knaz^~wimP'uG`