ࡱ> Root EntryRoot Entry1w`!FileHeaderwDocInfo\HwpSummaryInformation.S   !"#$%&'()*+,-./0123456789:;<=>?@ABCDEFGHIJKLMNOPQRSTUVWXYZ[\]^_BodyText (w`@+w`PrvImage PrvTextDocOptions 1w`1w`Scripts 1w`1w`JScriptVersion | DefaultJScript{_LinkDoc}  !"#$%&'()*+,-./0123456789:;<=>?@ABCDEFGHIJKLMNOPQRTUVWXYZ[]^_`abcdefghijklmnopqrstuvxyz~ 0 ܭ < 1. >< (8) Field Emission Scanning Electron Microscope(FE-SEM) System (m8) Ĭ ) Ȭ Ȑ  System> < 2. Ȕl1>< . Ĭ) ȬȐ(FE-SEM) .   ƌ0(Energy Dispersive Spectrometer) . Cooling cross-section Polisher |. Automatic magnetron sputter coater system(Pt) ȹ. Automatic carbon coater system> < 3. ܭ (1  ) . Ĭ) ȬȐ(FE-SEM) 1) Resolution : 0.6nm(15kV), 0.7nm(1kV) at Schottky FEG or better 2) Magnification : x25 ~ x1,00,0000 over @ 120 x 90mm or better 3) Accelerating Voltage : 0.01kV to 30kV or more 4) Probe current : 1pA~ 400nA or more 5) Image : Secondary Electron Image, Compo, Topo and Shadow 6) Specimen stage Fully Eucentric Stage by motor drive(X, Y, Z, T, R) X : 70mm, Y : 50mm, Z : 2mm ~ 41mm, T : -5 ~ 70, R : 360 or better 7) Load-lock Chamber : 100mm(dia) x 40mm(H) or better 8) Power Supporter for FE-Gun (back up time 72hr) or better 9) Magnetic field canceller . 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