ࡱ> Root EntryRoot Entry0Iw#FileHeader_DocInfoM{HwpSummaryInformation.E BodyText Hw HwPrvImage  PrvTextDocOptions 0Iw0IwScripts 0Iw0IwJScriptVersion f DefaultJScriptc_LinkDocg  !"#$%&'()*+,-./0123456789:;<=>?<  ܭ  > <1. >< (8) Gas analysis system (m8) „ ¤\> <2. ܭ  (1  1) - Analyzer : QMA 200 M - Contribution to neighboring mass: 40 to 41 < 10 ppm - Detector : C-SEM / Faraday - Detection limit min.(C-SEM) : < 1 ppm - Detection limit min.(Faraday) : < 20 ppm - Gas connection(Material) : Quartz capillary - Gas connection(Length) : 1 m - Gas flow rate : 1  2 sccm (0 C) - Gas inlet : Continuously open - Input(Analog) : 2 AI, -10~+10 V, 14 bit - Output(Analog) : 2 AO, 0-10 V, 14 bit - Input(Digital) : 1 contact, V in = 24 V DC - Output(Digital) : 2 Relais N.O., 24 V DC - Mass range : 1  100 amu - Operating temperature(Capillary) : up to 200 C - Power consumption : 590 W - Quadrupole controller : QME 220 M - Resolution, adjustable at 10 % peak height 0.5  2.5 u - Rod system(Diameter) : 6 mm - Rod system(Length) : 100 mm - Rod system(Material) : Stainless steel - Sample pressure(Standard version) :1,000 mbar(750 Torr) - Software :>GIF89aɻxxxkkk]]]PPPCCC555((( d`LH00`Hذ̘`H0|pdXL@`0H `H0`dHL`H0xp`XH@0d LȰ``HH00dLؘȀ`H0xp`XH@d0L `H0d`LH`H0|pdXL@0`$H`dHL00`HذȘdL0xp`XH@0` HdH0ȳ``HHdL0xp`XH@`0H Ը̰ĠऀؘpȈXxHp@h@d8`8X0xT0pH dxddxd`d`p`|``x`p``x`!, H*\ȰÇ#JHŋ3jȱǏ CIɓ(S\ɲ˗0cʜI͛8sɳϟ@ JѣH*]ʴӧPJ*V̪U]uՅa*VZd8mK^ق=kںv];xf~⭏Fn˘3g̹ϠCMӨS̺װc˞}Y䋷Qθbҿ-(ղbm:ܷF?f'"<ܾ?.^gk۬B'7>O^㔓\O}p9t]D%7tq}XԂau'Ymua{~ iThf8c!"C>HA^baUr ~(w!^a&%Xg%ەGr}Ef Z38srv~4F*G]^~9 mi&e[yh= ir'|U"gIez Zy["(b*j4 #hBv+Ng6lɬ>\J|"k%P hxmI걁YRVImF ci*vy]\.0 % ( X++Iȣ%q r+ d-KcppzIFmq̰˦bFg[ 2LK2y6& vtMvvw)0Vufꚕ< 0_{i+jjyqD]{wxTx-3WIwϞ?Kpַ*h˘:85Vw^Bi`pO>{ʱӾ3-u& !S/ӏo9=3|"N%[M+}s6G)9}_NW,ؔ-*>U x8R k~+Z'V 522 t!܄F Ї*" ȬAnB iLg6B ZbҾ"jEb6?9kbnX!.=|&X񋚃^/.z 3{l#K}&6EcU62'P.,P x1Ϗsڇ/ogI]].okC:_=# dINy5c | y"rnٻ}IYw\̚a/:P4DDiDm4]v2U;1kzacP6vJVAt GhzZUox 6m+MO#I9IW,{TV*R{)VC8Z01Hߦ롮qm3WK-71fזT MU3pEjCT]0jw!.g3JFp ܋EW'R-<TMkQ=3|.Y i "fQ)ZD0  1r!uхB,Hc j(. Al/yy;{ޛAx oԳD C'c*c*ӱ7sq*/S\sn*[C %+w_IKZK}r69=9;g߳m=ĮmDf]YE(; %95ķp7Feg՟n8 .6XSP.Wpǹ4; p'I )(N)S%Ȋp\H JE3 mvvr(poI,JE #[%UnXh 9YAY9Cd&NK^ @N).\Up3<50\ Nόs[ ?."ÏtȮV#-lko+TcDoFqs8)] {Xw_١զyMs \>(9ұm:;{oqc=QU"e-2Enh>M{'c}HWP Document Fileu@DO 6C,H,#GB!k0~ 6*7=M*Z:ҙ#?*?ӿT@Y~X+mj3'm[v|:j)%C$Mϼ5#cd߈er : QME 220 M - Resolution, adjustable at 10 % peak height 0.5  2.5 u - Rod system(Diameter) : 6 mm - Rod system(Length) : 100 mm - Rod system(Material) : Stainless steel - Sample pressure(Standard version) :1,000 mbar(750 Torr) - Software :>MlE߮7v (%-`7i ۸Ҁ):i1rۢ|)H B!H %R^RD 1 r\r {3x]zz7{}e:|^ Ǹ%|&L &S|ڽ^,:腸Uvn3}xMYܠk7$Y'g5vh{6i=e]=9+"8x$}OncUqD`sva>쒧+KIJHV$8tvlS! :o~qINU,瓾$ji{Ǥ1}8Bs|nԎvpvܫ˻fjTF_o \u%fsv-qVJV&?Jn/8 nJlA7GOhAnR]5jzE%B[PESlwЭ&!iJ\^AɓRB + $= ųG=xof'Ic"8˗<&;7đCYdB8JcTzq1?fC/"d rpc!j }p*] !|Pq >Ε@Pw=jy5oC0#K Gw9J{91b/d~\DKԂ;Y%QB)9>f³Gu}~ѱ:^SEULtIzjM*H8%~)g&xg=:ktB_V`t.CAš.|*2*g7!ֵpxZ kS*W83s&g߻L2MjDyJ])zR&~ηT r㚺3yN2G]E}6]-wzLywP}1k4Qo\$pd/\?=Ji4 SM4y ,W~]K&`+ݨkUc^mKc.cIwIJVZ&ܠl7 L