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Process Chamber Module 1) Process chamber - Chamber : Au coated on SUS chamber inside surface (Process chamber is one body SUS block) - Reflector : Au coated brass body - Quartz support pin for support graphite disc(for improve uniformity) - Fused quartz window - Chamber purge & vent - Gas injection port and pumping port is symmetry structure - T/C Feed-through with ceramic isolation - Round shape T/C quartz - Bowl type process chamber - Water flow sensor for heater safety - 2- stage chamber support plate - Movable align support block - Chamber up/down operation by support block - Unique designed flow path for lamp - Flange for pyrometer at chamber center - SiC ring for improved uniformity 2) Substrate holder unit - Quartz substrate holder : 4inch wafer compatible - Wafer loading by open the top plate - Ceramic electrode for halogen lamp - Unique designed flow path for lamp - Absorber for process chamber 3) Heating source unit - Tungsten halogen lamp : 1250W/ea - Lamp holder made by water cooled Au coated on brass - Hemisphere type each lamp reflector - Light guide made by Au coated on Al body - Water cooling - Water flow sensor for heater safety - Temperature controller editable 4 profiles and can save 40 steps 2. Vacuum Module 1) Vacuum pump - Rotary pump : 180 L/min - Ultimate pressure : 510-3 Torr 2) Pressure gauge - 1/4inch VCR connection type convectron gauge - Rugged all-metal package is highly immune to RF interference. - Digital type pressure readout & cable kit 3) Vacuum valves & lines - Pneumatic type angle valve - Pneumatic Soft pumping valve & pumping line - Auto vent line - Stainless steel hard line and flexible bellows line 3. 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