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???0|\1"|\ [0]2Ű @?Ű @ }%3 6 Ŵ Xt|l   4}ŒG} %OO 5%o% ̙ ??v%  6ȩ+ȩ I}% 7ȩ 1=ȩ 1 I}%O 8ȩ 2=ȩ 2 I}%? 9ȩ 3=ȩ 3 I}%23 :ȩ 4/ȩ 4 I}% ;Lǒ7L  a% <%o%  ???%????????? ???=T>"T [0]+\ %?,Xt|l  XTableStyleMedium9PivotStyleLight16`vbSheet1LSheet2ܸSheet3RR  ;  Dimension (mm) : 7Top plate open typePort :  7Electron temperature :  7#Water cooling or Forced-air cooling 7Analog I/O control 73Lock-in type detection sensor (Band width : 200kHz) 7*Digital-controlled system (DSP controlled) 7.Capacitively coupled plasma (Bottom electrode) 7 Water cooling 7Pressure readout & cable kit 7APC(Automatic Pressure Control)Throttle valve controller 7 Main valve :Fore line valve :Roughing line valve : Process gas: 7CH1 7CH2 7CH3 7Purge & vent :N2  Metering valveAAll gas lines are welded by auto-welding method with VCR fitting. 3 ~ 5 kgf/3  7 15 ~ 25 ! 7gAll consumable, such as O-rings, CF gasket, ceramic parts, view port glasses, gauge sensors and others, 7"Matcher and Controller Combination 7Weight 7Color 7General 7!Anodized aluminum (Cylinder type) 7 ICP Source 7Plasma uniformity :  7Plasma density : 7 2 ~ 5eV 7Forced-air cooling 7 Auto-matching 7Software suppot 78 - Windows-based user interface : Matching time display 7 > 1012 / 3   7 Vacuum Pump 7Pumping speed :  7d" 5mTorr / min d" 10%  7 d" 1% of Setting Power  7 Connection 7Flow : 7 Pressure :  7 Temperature 7 6mm fitting 73 lpm 7 6mm push fit 72 lpm 7Purity 71/4 inch SUS fitting 7MManufacturer warrants for a period of one(1) year from the final acceptance. 7Ultimate pressure :  7TIt used swagelok pneumatically operated diaphragm valves, which is Air-actuated(N/C) 7$Metering valve for N2 purge and vent 7Tubing of 316L stainless steel 7 Voltage :  7 Current : 7 Frequency 760Hz 7Phase 73 phase 7 Connection 7 7 m cable 7Flow : 7 2 ~ 3 lpm 7 Pressure :  7 1 ~ 3 kgf/3  7$are entirely excluded from warranty. 7 Leak Rate : 7Gas Flow Tolerance : 7Remark wVacuum Pressure Control 7 Vacuum Valve 7Parts : w1kW, 13.56MHz  7Rotational speed :  7Purging nitrogen flow rate : 7 50sccm 7 N2 purge valve installed   7 SiO2(Oxide) : PR   w SiO2(Oxide) : Si   w  ~  mTorr   wOil rotary pump 7   400L/sec (N2), Corrsive type  7 27,000 rpm 7Automatic process controller 7PLC-based automation 7LCD touch panel 7 (7inch TFT, 32bit RISC CPU) 7 On/Off switch 7Emergency switch 76Vacuum port, View port(NW25 1 ea), Pressure gauge port 7-Inlet / Exhaust flange : DN 100 ISO-K / DN 40 w$Inlet / Exhaust flange : NW25 / NW25 wChamber material : w 208VAC10% 7Filter casket for each channel 750A 7Pneumatic type angle valve w Vacuum Line 7Auto vent line'SUS hard line and flexible bellows line Cl2  w > 400nm/min 7Forward RF Power Tolerance : 7*User port connector (25-pin D-sub, female) 7#RF output connector (N-type female) 7RS232 (9-pin D-sub, female) 7Front panel (LCD display; 4X20) 7AC power input (VCTF-3) w:Overcurrent protection (15A circuit breaker on rear panel) 7Case (EMI shield ground) 7PF power on/off (Digital input) wInterlock (Analog input) w600W, 12.56MHz  7( Power meter display 75 Tracking smith chart monitoring  75 Capacitor setting and monitoring 7 > 8 : 1 w'  ɷ, \ warranty 4<\ Ȳ| Ӭ   $% T % - 1 parts D̲ XՌ PLC| XՔ Software h, D $Ĭ  |Ǵ  ǔ Hardware $ ٳ,   )+-/0345678:;=>?@ABDNOPRT 250 kg 71000(W) x 900(D) x 1400(H) 7< 5% w408L/min 7Automatic throttle valve  7System Dimension 7Chamber Module 7 Vacuum Module 7single substrate w Ceramic type wMechanical chuck : w$Cold cathode gauge(with controller)  7Gas Supply Module 7Etching Process Data 7Etching Rate :  Profile : 7 Selectivity : Metal 7Metal wSi : PR 7 Si : SiO2  7 Metal : PR   w > 5 : 1 w Top plasma source  7Matching network for :  7Top plasma source wPower for Top plasma source :  7Substrate capacity : wSubstrate (Sample) size : wBottom plasma source 7Bottom plasma source w"Power for Bottom plasma source :  7Wafer loading/unloading : wPressure Gauge (PC)  7Process Capacity (Data) 7Control Module 7Inner Utility Module of ICP-RIE 7Warranty 7Substrate for Bottom Source 7Used Gases & Flow Control wGas Valves & Gas line 7System Control 7Manual Switch :  7Utility Specification 7Electric power 7 Cooling water 7Compressed air 7Purge nitrogen 7 SiO2(Oxide)   w Si3N4    w a-Si, SiO2(Oxide),Si3N4     7a-Si wa-Si 7 Si3N4 : PR     <w > 12 : 1 w CHF3  w BCl3  wITO wSapphire wGaAs wGaN wPolymer w1Etching Unformity (Within Wafer, Wafer to Wafer):  d" 2.5%   7 d" 2%   7 d" 3%   7 d" 90 1.5    7 d" 90 2    7 d" 90 2.5    7 > 500nm/min 7 > 450nm/min 7 > 10 : 1 w GaN : SiO2  w > 50 : 1 w > 25 : 1  7EInductively coupled plasma source (PCB type; patented: No.10-0734954) 7 310-3 Torr (PC)   7Low vacuum gauge  w!Baratron gauge(CDG: 1 Torr F.S. ) 7High vacuum gauge(MKS) : wProcess gauge(MKS) : wMFC(MKS) w Rotary pump  7 510-6 Torr    7 Turbo-pump(Alcatel)  7 Sapphire : SiO2  w > 4 : 1 w GaAs : PR wForced-air cooling 7'Installed Vacuum variable capacitor 2ea 7'Installed Vacuum variable capacitor 2ea w100 SCCM w50 SCCM wMax. 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