ࡱ> Root Entry@tDFileHeaderDocInfoRBodyText 0TmDPmD$%&'23456789Root EntryDFileHeaderDocInfoRBodyText cD؋D  !"#)*+,-./0  !"#%&'()*+,-./0123456789:;<=>?@ABCDEFGHIKLMNOPQSTUVWXYZ[\]^_`acdghijklmnDefaultJScriptb_LinkDocf PrvImage$j PrvTextSection0(HwpSummaryInformation.JDocOptions DDScriptsDDJScriptVersione <ܭ > < 1. >< 8><Gas Delivery Distribution System><m 8>< 00> < A. l1 (Gas Delivery Distribution System) <No.><Composition><Quantity> <1><Frame Body Module ><1 Set> <2><Top Plate Module ><1 Set> <3><Frame Cover Module ><1 Set> <4><Micro Regulator Module><1 Set> <5><Ar MFC Module><1 Set> <6>< PT Sensor Module><1 Set> <7><Gas Line Module><1 Set> <8><Source Canister Module><1 Set> <9><Reactant Canister Module><1 Set> <10><External Gas MFC Module><1 Set> <11><Pumping Line Module><1 Set> <12><RF Generator, Power Elec.Module><1 Set> <13><Program><1 Set> <14><Hot Trap><1 Set> B. ܭ (System Specification) <No.><Item><Description> <1><Reaction Type><Plasma(O2,NH3) Thermal(DI, O3)> <2><Dimension (WxLxH)><1050 x 750 x 1260 mm > <3><Weight><< 120 kg> <4><Uniformity><d"2% (Within 25poHWP Document Fileint EE15mm) d"2% (Wafer to Waer)> <5><Cycle Time><d" 10sec/Cycle> <6><Growth Per Cycle><d" 1.2+!/Cycle> <7><Deposition Rate><e" 10+!/min (Ref, Al2O3) > <8><RI><Al2O3 : 1.55~1.65 / SiO2 : 1.4 >GIF89aɻxxxkkk]]]PPPCCC555((( d`LH00`Hذ̘`H0|pdXL@`0H `H0`dHL`H0xp`XH@0d LȰ``HH00dLؘȀ`H0xp`XH@d0L `H0d`LH`H0|pdXL@0`$H`dHL00`HذȘdL0xp`XH@0` HdH0ȳ``HHdL0xp`XH@`0H Ը̰ĠऀؘpȈXxHp@h@d8`8X0xT0pH dxddxd`d`p`|``x`p``x`!, H*\ȰÇ#JHŋ3jȱǏ CIɓ(S\ɲ˗0cʜI͛8sɳϟ@ JѣH*]ʴӧPJJիXjʵׯ`ÊK٩Ҫ]˶۷pʝK]27f߽A$ܒqc&V<8˷%g|`LteA,tg~Ygeԍ;yK(`sGFw^]俵g8cy땼4ݷ/-dCLhWIWv5$BTF1ge]dաY_]܇ (e(ՃE;M[څ^G߅9x哏|hbTH*IθCMT%Xej"vv-CWN9BeJx&b雔馜'{ bsiXƧfIY|q幣j=js2h ‰)uRjv O6``ŝ珗7kNo.v-7ޠy()"drZWeD,*=mJ=hƢ:jw8䨿b,j"WFk9/Hmpֈg~l/{tf:ᄊX CETk]ì‰x}\îZ1s\1v72iž':l#' 첓C,qN|s3ڴ+z\=煼 uW;=sJ]VC A p-]rm7.]*̛5օO+H*z7soy+53菵3Hj̞-s*gHyNzԚX@N* S?vwczٰj?*;tWtHx[M>ÄW뽛215߷ V!]G .K^*0E' qK\1=U&T1 !B0a9T:Uig!8&%Pbh++ ^MO3Π(5mʼnQ$c4֐랄#sߩGH,ԡV5qF4٧gG_D?@ABCDEFGHIKLMNOPQSTUVWXYZ[\]^_`acdghijklmnDefaultJScriptb_LinkDocf PrvImage$j PrvTextSection01HwpSummaryInformation.JDocOptions 0tD0tDScripts0tD@tDJScriptVersione <ܭ > < 1. >< 8><Gas Delivery Distribution System><m 8>< 00> < A. l1 (Gas Delivery Distribution System) <No.><Composition><Quantity> <1><Frame Body Module ><1 Set> <2><Top Plate Module ><1 Set> <3><Frame Cover Module ><1 Set> <4><Micro Regulator Module><1 Set> <5><Ar MFC Module><1 Set> <6>< PT Sensor Module><1 Set> <7><Gas Line Module><1 Set> <8><Source Canister Module><1 Set> <9><Reactant Canister Module><1 Set> <10><External Gas MFC Module><1 Set> <11><Pumping Line Module><1 Set> <12><RF Generator, Power Elec.Module><1 Set> <13><Program><1 Set> <14><Hot Trap><1 Set> B. ܭ (System Specification) <No.><Item><Description> <1><Reaction Type><Plasma(O2,NH3) Thermal(DI, O3)> <2><Dimension (WxLxH)><1050 x 750 x 1260 mm > <3><Weight><< 120 kg> <4><Uniformity><d"2% (Within 25poHWP Document Fileint EE15mm) d"2% (Wafer to Waer)> <5><Cycle Time><d" 10sec/Cycle> <6><Growth Per Cycle><d" 1.2+!/Cycle> <7><Deposition Rate><e" 10+!/min (Ref, Al2O3) > <8><RI><Al2O3 : 1.55~1.65 / SiO2 : 1.4 >GIF89aɻxxxkkk]]]PPPCCC555((( d`LH00`Hذ̘`H0|pdXL@`0H `H0`dHL`H0xp`XH@0d LȰ``HH00dLؘȀ`H0xp`XH@d0L `H0d`LH`H0|pdXL@0`$H`dHL00`HذȘdL0xp`XH@0` HdH0ȳ``HHdL0xp`XH@`0H Ը̰ĠऀؘpȈXxHp@h@d8`8X0xT0pH dxddxd`d`p`|``x`p``x`!, H*\ȰÇ#JHŋ3jȱǏ CIɓ(S\ɲ˗0cʜI͛8sɳϟ@ JѣH*]ʴӧPJJիXjʵׯ`ÊK٩Ҫ]˶۷pʝK]27f߽A$ܒqc&V<8˷%g|`LteA,tg~Ygeԍ;yK(`sGFw^]俵g8cy땼4ݷ/-dCLhWIWv5$BTF1ge]dաY_]܇ (e(ՃE;M[څ^G߅9x哏|hbTH*IθCMT%Xej"vv-CWN9BeJx&b雔馜'{ bsiXƧfIY|q幣j=js2h ‰)uRjv O6``ŝ珗7kNo.v-7ޠy()"drZWeD,*=mJ=hƢ:jw8䨿b,j"WFk9/Hmpֈg~l/{tf:ᄊX CETk]ì‰x}\îZ1s\1v72iž':l#' 첓C,qN|s3ڴ+z\=煼 uW;=sJ]VC A p-]rm7.]*̛5օO+H*z7soy+53菵3Hj̞-s*gHyNzԚX@N* S?vwczٰj?*;tWtHx[M>ÄW뽛215߷ V!]G .K^*0E' qK\1=U&T1 !B0a9T:Uig!8&%Pbh++ ^MO3Π(5mʼnQ$c4֐랄#sߩGH,ԡV5qF4٧gG_Dkb=#>}QF훧{@$j6ʎ&0DU~kwgQ&0o¦&b51)Om;ZnKjDܚy6{O?'W; 9W `f!`ؼ.LnA ^A"E/XNye3P4a s܊Lsw?=,cX;WȷL-/f4u֑Y8sdbeʑâ#SL;JA=b1(ys/%LQ `eHisd [f5Ht799A\k@,Pn|z j{i+ױ٘j6fܟ̐k5o>g۟wH:=ܘȢ*J3I44nCXcs@vӚ ,5#Xm#QpBRFl%=lLq IM(`J{ؤM>>R)/t;ڴ"_?٨,%a.Ves^313^M’Q* uٙ4}gq(~J LƢSLyJQ2~aJig aVP;ApiԿJ[g~D"cd߈ 1Kd`$&ELMS\C)ޘ <3><Weight><< 120 kg> <4><Uniformity><d"2% (Within 25point EE15mm) d"2% (Wafer to Waer)> <5><Cycle Time><d" 10sec/Cycle> <6><Growth Per Cycle><d" 1.2+!/Cycle> <7><Deposition Rate><e" 10+!/min (Ref, Al2O3) > <8><RI><Al2O3 : 1.55~1.65 / SiO2 : 1.4 >ows_7@p' $@PmD@sYee*:Å $$䓻T3dk7A$ե7AVkA~3J*؛ZQ "x1O5Д-/BH/xAD%գGzl6I&TN@%4IFU6䜜)bt=ˢpsmɅG8iEe*k)Tit_UgDr ^}=xE5Qo n JfG(/Ko+8?BE/aRI *4$^tbc:*T^0W-x=˛xQI%q| &%0Xu 696B>kb=#>}QF훧{@$j6ʎ&0DU~kwgQ&0o¦&b51)Om;ZnKjDܚy6{O?'W; 9W `f!`ؼ.LnA ^A"E/XNye3P4a s܊Lsw?=,cX;WȷL-/f4u֑Y8sdbeʑâ#SL;JA=b1(ys/%LQ `eHisd [f5Ht799A\k@,Pn|z j{i+ױ٘j6fܟ̐k5o>g۟wH:=ܘȢ*J3I44nCXcs@vӚ ,5#Xm#QpBRFl%=lLq IM(`J{ؤM>>R)/t;ڴ"_?٨,%a.Ves^313^M’Q* uٙ4}gq(~J <3><Weight><< 120 kg> <4><Uniformity><d"2% (Within 25point EE15mm) d"2% (Wafer to Waer)> <5><Cycle Time><d" 10sec/Cycle> <6><Growth Per Cycle><d" 1.2+!/Cycle> <7><Deposition Rate><e" 10+!/min (Ref, Al2O3) > <8><RI><Al2O3 : 1.55~1.65 / SiO2 : 1.4 >"\`*('fs&Čhx96?Q]dCzej?Q׵y9^[soy&]N̕MhA3;I7dQTq8hتhUF VS@ ZXCzѣ n }C{ۋ  " ʎCNsx$?=apX}"ݽh)["-2=gLkjK 3Y6'C滲c7bVܧYR 7#άϒ`2FG%.m'_-=Nv,GB3zt'߸?vඞmRfJZf> l~&gϧu, i9BI!-OmzD|/6>v BIPYQT\CE*2vl%wSsK<4-,>Fczwsf*K-R#^EgpzVUp=ĉ*KgiE'wrLpEYr3AO9$휤}(׈-[t| **o$3*jL0 Daӱ6yb Fic-\sGodM$z@]6i15_0 ($6aϙuPk+vng[.N0]6G0,@c@L: $8bmP"ܗq.iDTyO\EtΈiؘӑ1b63P 4ށpF"mt'a:;i?WF3B c "-g$ (V8B^'ܦYOh5j$j@ohĊ>;{ڍ5濣iyŝrBcJǂ ՐxQ9-۴+KrS%" MȿuaZ]`т kD="µ\U4ASm ALE|K EXV ]qj"Is'k#XMh&67*|OAPh7u!ACCBP `o#`'N0cS-`Vo%6ߡ.o60%D=6! ␭s !]/ҍt#){d+$?Z/Q؆Հj@Plm6ޕX4lRI𗨀7H##qOYzgBМ^O3/}-ޑI;|S/}TY5[ [/lgMBUzH^s0qI{n*PnRH} ü^vWS #":U8 'Ep_E\NKwVs[˯.l_W?&J*) !| Iڣ7|@) ap[U%B3OEu},E[} BA,6`OnȫeCH.{ CD)b)إ}chj/\w^9Q@BJŔcJiGlqݴ1PB p μ"k@w|#>ϺI,)8/{谪',5ܼ԰9#'"Oȃ"AXW!I ` l[ڑ) #c Zhٴ |sG__Ñ0D.^:?ҾٜԌfjoٮIb'ڑbi喴oЈmY"㹥 DN)1$`@]Fc yaږY Q|l'3M{H6"zJTy\,% Sq)N8uRVLְZzح(zE1Q=D y jA z˔q R8MSA<}&}CJ 3ߢ^TSQh;rwY',}ȋ"bf%҅9(~*mVd\hoK;hm3'[mp7ѾZ^#xM[l7ؼ]U?,DA`G]w;qB7k&Гv0CLMWz)Jgnq6mGl*~DׇKc`L$,ZH$ƌwl+%~ ͜5`dMLJ;-YՊw{qIlg>ݎ q`}{V^}Su}v@A5zOިq#o}a8`>.kt,M;/7-e /8ZO-]،<&5C!B7Q]I(bG ٸ( i(WU5 =~ǻ2X\4fh~#xJ Qq+Vۏ^2CWϭF5J>8G/ߍ,`,iV>R0Oem}/^pYN:Qÿvlօk&ysuW tKy!񕷞!ԳzN'Y3-n,[WʬxiM~w{PІia1߾zT%sc,~]n~}TQcEԷ5c`Xl @)8j8Bb@ <X,dΡ-|2JRd"'Y kx馈o*09aDqg,HHO:Cq y\x6v|e>FLB2-ui 4+Q`8Ú+E\}s!ɐǐTqk_$\U`8q|Q:@P