ࡱ> 6Root EntryRoot Entry@~eFileHeaderQDocInfoAHwpSummaryInformation.H 4 !"#$%&'()*+,-./0123589:;<=>?@ABCDEFGHIJKLMNOPQRSTUVWXYZ[\]^_`abcdefghijklmnopqrstuvwxyz{|}~BodyText0epfeBinData pfepfePrvImage PrvText DocOptions @~e@~eScripts @~e@~eJScriptVersion ZDefaultJScriptU_LinkDoc[ BIN0001.jpg7Section0 !"#$%&'()*+,-./0123456789:;<=>?@ABCDEFGIJKLMNOPRSTVWXY\]^_`abc <><><> <2022 ij  P! Ŵ  0 HŔƭ> <><><> 2022. 5. DYP Y|ǐǬ 췤<0 <1><>< > 1. ũ - T 1ǰ | ݹ 0\ ij | xǬ !1 - 4P!D t  0֥ DՔ\ 4ɷ T  %  2.  . : 2022YDij ij  P! . 0: Ĭ}Ŵ̰| ~ 2022.10.15 ; |: 2022D 8~9  . Ĭ}): \սDž0( X\ Ĭ}Ŵ̰) |. ư: 20,000,000(VAT h) tǴ 3. Ȕƴ . \: 2022YDij ij  P! % P!|: 2022D 8~9  % P!: P Y, x, ŭD % P!Ǵ - ij  Y   Dij 0x P!(2 )  <l><P!Dž><><><><D> < 1.><ij  Yյ><ij X 0  T t`P! - άX l1D \  ‰ - 15(1, 2) (|x  t`P! ‰ - \ͅ Yյ ‰  ̸̬ -  P!(10)   (ij ɐ 4 ‰ P! 8 )  ><30 t><P Y  D 100 x ><(|x ><P! Ȕƴ *8  - ij ȵ - ij ȈX tt/p  \8 - T (Oxidation) - Photo Lithography -  (Etch) - ɹ (Thin Film) - t(ȅ (Ion Implantation) - 0 (Metallization) - CMP/ij  - 0 ij >GIF89aɻxxxkkk]]]PPPCCC555((( d`LH00`Hذ̘`H0|pdXL@`0H `H0`dHL`H0xp`XH@0d LȰ``HH00dLؘȀ`H0xp`XH@d0L `H0d`LH`H0|pdXL@0`$H`dHL00`HذȘdL0xp`XH@0` HdH0ȳ``HHdL0xp`XH@`0H Ը̰ĠऀؘpȈXxHp@h@d8`8X0xT0pH dxddxd`d`p`|``x`p``x`!, H*\ȰÇ#JHŋ3jȱǏ CIɓ(S\ɲ˗0cʜI͛8sɳϟ@ JѣH*]ʴӧPJJիXjʵׯ`ÊKٳhӪ]˶۷pʝKݻx˷I LÆ%)ViǐӻG2q1̹ϠCMhS^a۲]=ںi;xnc[sﶭ|Nώ8w~p[5z{~w6qu׉~wRI_| RW\yև q'w[Q`~ o*:{(&4FnG ף>&w܋!7R$7{=($x$z8K=-V)fz I"X* h]uK"h& #f8%+~ל~8b}y7ԇdzEoa H~&f|0~}~֨ꪬZ*무j뭸ƪ+8 `ǎ6FHVk-J+:覫+k,0Ll''(#nsŜdōu@@@ `D ?O3O trs>cdB\uM;=Ǟ 5 =O8Do, c S1 zH%0A=!Aw&։9dpLT˟gNČc8$ؠK=g*ර6`zg̰wÃ)`}ֳA&Ч>b떈.[ ՇE d|{ 52@1ca m`FX6|Pex>RH\CŘ@2VM{C@X3z0c&b4u̻'K\"*w35`y XK,|^ẖ- <yCrDưj*oȈqeR6%jdvp̬&w-n\ƈh o`NxMpoCa1SVỌ\pP([51k\]|)k(#^y- V汅re$F)f15bck*ծz` XJֲhMZֶjsv*t5I]z&Lɋ>_W' GQUWd'KZͬf7z hGKҚMjOr'NL "&dPJR_bnr'IqT΋#D%)"q%(钞堪]Q"J nt9D)GiHz-Q~K.]Hϛ6ĦjPJJo{elK)r"'*BH [ΰ7{ GL(NW0gL8K@;`a``a`0x( H   Y% ijY!1Eom Sang Hyun2014D 10 30| | $ 9:25:21 Y|ǐǬ 췤<0-9, 1, 1, 5216 WIN32LEWindows_Unknown_Version@Ғ<@0e@HWP Document FileOvar Documents = XHwpDocuments; var Document = Documents.Active_XHwpDocument; /function OnDo  BBjpg0aѹ@   Malgun GothicPa\Haansoft Batangahl˳  HCR Dotumahl HCR Batanga4<4<a4]}@@8Ww@@2Qq@@ ,Kk@(p.PF]0u`@0 H_wpP02I`ax@ pP4K0cz(@.> N]`m}@ ` @(8 HW`gw@ `@"2 BQ`aq@>]}@@8W@@2Qq@@ ,Kk@v 2^1. 2^2. 2^3) 2^4) 2(^5) 2(^6),2^72-```(`(``(p`(@``('` `( .`( 6` ````*p`(P` `` ` ` `X`X```X`22`dd``````X`X`X`X````j````'`` ```XPP`XFF`X`XPP`X````````` ` `Normal68Body 6 1 Outline 16 2 Outline 26 3 Outline 36 4 Outline 46 5 Outline 56 6 Outline 6 6 7 Outline 7 6 8 Page Number 8йHeader   Footnote  Endnote  TMemo   xl112xl112 @pȩ`l8 ` 0Ai: ٳ|`8 1 % @@@@d@@@ @d^@@ @8@@@@@ʇ@P@ T #0(&T)D̰0(&I)D̰0(&I)@ ٳ D̰0 ]@@@ P 8 #0(&V) P 8 #0(&V)a@o@n@b@c@~~|@0cument_New() { //todo : }  D 100 x ><(|x ><P! Ȕƴ *8  - ij ȵ - ij ȈX tt/p  \8 - T (Oxidation) - Photo Lithography -  (Etch) - ɹ (Thin Film) - t(ȅ (Ion Implantation) - 0 (Metallization) - CMP/ij  - 0 ij >JFIFHHC    $.' ",#(7),01444'9=82<.342C  2!!22222222222222222222222222222222222222222222222222"!" }!1AQa"q2#BR$3br %&'()*456789:CDEFGHIJSTUVWXYZcdefghijstuvwxyz w!1AQaq"2B #3Rbr $4%&'()*56789:CDEFGHIJSTUVWXYZcdefghijstuvwxyz ?( ( ( ( ( ( ( ( ( ( ( ( )3FhhK&j0H #ҹ+ȵ[cboVV ["UaY5aAb \ſ\jh`_q彑[Efύ|Ou^Iw>}u>\%ffU>3xG֒ß6x]V}sIfMNA ?|lh\㢌ՕPat؈XW>ƟI4"zۄ?־Կ)%.X}>$Ǒ 9i[#Q3@ZY]UEl;4_5("S ]5Ɵ\`^[^ٷv(GJ~ɬq4+ Lu| -^ݺFlslҷ3(IX4LQEQEQEQEQEQEQEQEQEQEQEQEQEQEQEQEQEQEQEQEQEQE&hi*XVsu +pS^i6ЬNyH֕ _g:U1r_ e}E'卯[q?R+u%Q??usU ٺl&֑W 1\դrK۵4zFdȡ^0k|k=k"Wh۬qě$u4o?#]ºHVKA-.O:{*>'cK #R$٧\6yfƺ;'eOCq0Kđ HQ`*SX4o8(Rm͟ZkX_pC-VmgՃDҭq}6,tUBdQԜm(ElaF.((1F(Nm#MP*UњiX| kDG.xN* \͚(c(=W`96ܩAʹmClkz?[|~5&+xf㻹CK@4˫en"=Si~(tm :Fr'#ʂ xjư0$Z@<ϯˌ52VkX3tzTլ A&'BE}`*e1wcg=Zu w>]yh;L_m>"ĮEу+ SE;5}g5 \ǝџ znu '\r:hb/C(#^o?L;nW:ƴs\ 4Δ ERQEQEQEQEQEQEQEQEQEQEQEQEQEQEQEQEQE&hi3H,jTdp3o 4i]1?C޵Fu]DF g:hW1[@^FS^Qo2[vw ^_k/ӨIs18E'eQW_ោΰRΛhz 2^ߎ>CF~'*Zhu SS/Ds\1bǞ;}uO glh4ftN+;1ah \KH߆+gW2v墬 ֣? 7M_0ȟz5E *84 ȆTΤ;chbȢ((Ǿ2k:驧W32ц;OK|ICd~9gJwЫ&cxPw *køC %{]U)VqL-/ :I5kLWլQE*גAa4ᨤY#ІV.A(nOaj_9xzm:{Yk<.T?J x7~/m5ay"ύxcN5xn cZ`Fxm#7>^~ [y$lTFktxMZ7/tVVAaQ~=ta%8r # 5c_Ba}'6EZN'å- K_PI5P=͍'Wk5}~Q>@=JozƵ#V-N)Ɍ:r+ȼQvĽƅ/ۭ& ӳ~J'\Utj ^h.t˸=z|ouh:762Џk<)7|IKtW=|pZXIh^'&RDlƦ4 ( ( ( ( ( ( ( ( ( ( ( ( ( ( (K'~v>$a$p++] ˧;De^N}ߟxzg: .U=#%Gݎo=[N6v~[hۂ?? @ְ6`'ݏ5> C>]@LelO^1E*F =tWï0곗o` GE95#?G'WRgbQ{#_8xFf{NFVwHE=+OQq{aaS+ϭ-wQS=qxB['UvG5LZZA\ǩ&#N(̈R)))kBn9|` {znW(IXM5tQE!Q@!C:W{T {`ёώ_ҿݿ*x^ +bա]r8M{傲ߩJJ8qҊ_][G)vo|uo+uޟ|pgO<5a}61#i>FxGᲵX"#<-t_Bc 5%gZQm5Z/*,ņy!B??A#uO?RSܝ"1DJZAҖ|(9V_.&Ϋsnq4Vs2ЅM>]nj \u9C}{ׄ{7KY=JJeW/t]Wh?O>j[Kuw,fS+pW9ݥ>-y-,=;n kEt H EyUNfu#Q^#XQ@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@UkBMd  f+xYcw8 =IIuL$xlCOb׊kKMi*Gf?|œm#bIOPߠcZw^U%3~S m:@9gHǩ?ӭ}i^g_>ȣs{/Gs[Fci, 裖==Ͻhrb"mGzXޟfk>"|=ɱ@ʩ9ܳ')*Gϳ/H#uޙԯĻ]Sʟ>8t( (81H."6q2eN=GO3N#7_@bW]mZQnϊ?禟ϊ?禟1F+_*D}N'NELr寕!c; 4_BU"Ο_#Wx'G#ЫҡVUprS*#0ȃ/|G Xy" 5c_B˿̼WWt)k=0(3Y:ƓE2Y^[ݢTF֣,:χs"h޾fּ/֟x**OсpXO޳s׬鵥ѩo]xSX ltZlOKW=:v]ZDtX8c%{_Xǩ8 Xy /v?'?2 zfӊϧ)sQ#ִoh o⟌U<:X0IQHf`)>=yΫ]wEŏYцGPiΰ7 [8*TTb'8rjx+m ^kEJf I^h.n_I KnBv8}IVǀ<љfe䇸p8>3ӵ::+ֵ8~Ք巡Z_i<%վ#%o7f9?/lLOGѬ/XNv:WM%ή5R"n'=3W^kVM}b:js8,m<m;+~Q`mu˙xxϪI^ddj%u]uO|Iӥ{(Xne&Ua+<}}3:r^Wߨ^UqvtRQT/l^ć 7+3~_p?!^*aiEsHu0|:I5f-?gn|x:'Υxb278~%j{xf^~u5pIHrǓԟX*+y!N<yZ6NfaqZ~k Y.,ǧԚjw E+I;w.y23ȯ|?m[͢ $\d\Z׫ X^L_  Hz~1TlDGmzVT6z/uQXQ@Q@Q@_ i?F)O)}JFh]qΏ׹SSJ??^ f#Ѕ}mR}7[®O:REp!EPcMGJխP꒠#=SMt&<ğ2]ly-ʟe~ּNּ/(cpJ:UlKV꒠a]sҧ2:3|5QoC:yрã~޽sC>(<29 G꧟^{OF- (}u~Pu v7sua t:lVj:M]MZ{J7-Ey(IV{/4dv$עxwb]j6e @ߎ>ݰ/wیpG.܌k=*<9g}mu 6<p{?[{.#]TJNvG Wms<¬(˩5%QҖ+ k(`CA ӨmkA#縳A=Y=Gn|U=T^Y{v?,;Ls߉ MsB>kh~#zLb5LAJgx6$c,$p~mXz"Z🊯'- .-ʾQ})kvZa&dCXv"qxGBW_ 6]TV{TQEqEPEPEPEPEPEPEPEQK1Tdx}%ӴҠo?Acd&ʇ!/Z<k?;Hk:_(z#U^ß2i07#;zPP(TE @EeeoCiio H`(c818W48 E&j8"9D#muW9-Q@%-s T:Mkg $[;@zwh6bL1hܞN6IB>S:c̲ǖkn1f>Mѣn4[{`3kr1z=MmbW\MZgD( %j]Ɖ]iC[T`Cƽoω<9=p}e>9/>˭-"x]ÁzU/3uk=jiް#7ey+խZ|-SNf)iJ3xg-Ǖ"FYk~)x_H,voo œ;A\N1LFkuoe{D=Re`?#\^OjYe=QS.wS+K2 mOo53Nڅ?ʟ?u7 G#vF WD$Ii+9\&^6]1"f$+XU&Lʊes7{/7iI'^YSCu{Ɵ H@R 1[_>iauqe^T}ecS YjW )Տ֎kӼUi$}WGDK'x+yWK57fik4U-X)8+Ѿ.kR+˧L{\.SS^]yӗSf)oe?s\EOi>m=T0vq[yA5շ+|O=+ IժMB Lـ A_K9n4i9YS3!İxïGxM֖@:mtBo\? OֽGOj8yP+ۡFQEsQ@Q@Q@Q@Q@Q@ ~#|/y6?#;{ t֭k7:}I^ ֦8*b􆆾k2 f\EFEVEWEXmvQE1,V̲аw1EROT6WaEb{È]QJHS=Fa)E]-K}?/kO?/6#+G Ro}ƢJfKgǨT3 $,jſ/WN(z?OjGC7> /[ 0}+*UѤ+N3-__i\?20?|c^ikuas-HׯZ4&;OFxy8p֞;b-%k<[NgPrxݽQ.-fhe$VQSuugJW:eYY"1ąxF c5(Rr'9nTQEAAEPE9_g.4H[NFJ'vQ܏JO xQn'=??t?z5:.ܹ?˱Շ-)66ðʴ49Գ٥'Ű<,丈zc]xҋe=WAET(((()3K\_ xnG}uvE]8:QIF.L?^.Əi&l$/OjׯcDl[tyG{x@Ѯ|Ei睫N~?}GFo٦-"}_ƽl]Ew~' I3ՕxG帛T (]95[xCL0"Q_:jZ%Oq)=p'[ޖ?ujjnO$LT_uh4/P.Ns^+ xR#m˝Q)xAk[Wu /wz{W~*rĪzGs-[R4%3?}{W#hS8Yl * ( r+; %ޛ]J\9>;?Ό.݊mXو̇}+ձ4cɕϓ!,W𱫯ѡWj-Ƹ3#nA+)á'M>˳Կ-r< iq\%$pwRxRXUA8*~zkܖO/oO_?(xGG "}M JH:^X~̱_}gSQa~#Zk[Q_2QEf(nj \3c-7+|%+Ŗ ̶}ǨMkwqcuͬ 688VW7=7G׹▼? ZfcOoJׁVKh!8^"f2ʗ56iQ' <+5NbGA?S>!iowI͜{yHǩ??QuLET Jspjǩn/Xt7M]&Y.q!>ݙA\)>ڝyhϬs^OhUvWIHYFlN0vp=Csʁu* ^d%<5k%O>x+$yX>\`;?OM}*C+ W~:WēZ(of={ש|#Y4vѮO/oߏAb!9pp#()k;Š((((m7xy|`:NO^_gDZnaR"?? c~oxO p|ۂ?1|ƽ|yIR|-6s.a?+u}/N}[ds?X$$5t5 -|)oi ]܁&;U¯W-*4x׈7ștQׯ_c-6sU=|ϐ?Oμzl:+ -)wSѶ)|~;k8zgN*49p۩ yW_ IGc u  zyWƝ~8t} &{Lצ~s{xHr'sʼ%u%y$2D,5V+:C7.bqu+v m}0:WNhө#,|#bPAg?Q_?kԼ7 SWجkBAnB܌zYaqXEFFxg‹J\XdُA}:V)a=,Xr^I ǠzqZ5sEh] n,<'X;ic-ǩOOVNӝ[Vsd@?1hYggi%v,%I]X?*mqwyyyfbztQ^Q@Q@ScrvQW{M"敧)9z}kUT`U]:,-%庹5n-3G{܎~ak=(:v/̼H=Gs5dR qz*MgҾ_izӷ>o7gB|=RV?z¥8#hJNyxzQTtVv A:?ǯhX=L5YRƬ 8=Fh48gN6W{~C]_Z<-Ԍ='VԆS+>?>K3 _aQE}Q@Q@ E{/ßvDץf[ݱ'hkЅhҝYS4c<ג0nY9eF|=ju#R7G9? [xD{I01(CЏ|ѨXwD\@]b?C_]c'5 4['*÷] W0\ SPnmlq;088/|'OO,̌?}p~C{nHjgK:/һqt+֚_sЩN[{O~+Giier잧ߠ-q{udgIfv'$՝#Gu4fw:(X yaX}zvG샷שNRU12%i[X5iAˈ?C3k◅ɩ[^XFOot^%^];7# ̒@==W~+2T?C'+ FZ:#r=LXuh5+ هu>.Q)DdzG#5|l aC|442 Kg>i*m$F M&3aLZkr:W֚ :ܽ<3►@ ?| >eSN ]6R'j:}oxĈfג|/e?$=P^:W^QT +@(('BoaA<*9(Sl SFm*Or~RC 2bP;Ȉ}Ѥt݉Fƒ??}S*("(8lj8ЉÅFJ:W|hӥ`ip =zMWP1$!I`יFx)hi%'B?Hk}/l-|;pV~Լ+w$c6bQJ~5N/y΃qhSo H+a-pV#־xԵsUkUtg8HRKA^=c[Z|[{nFWe9O+t7~x;}̹_Oÿ5)kĩRU&-*AET&kߌd`V#?nj7q'+xڕtQz],/[vgw-ԭ,9y$ WЭ4<(((wl~v0{t}8|1|wf?So_/Sp|eEWFQEOR[6!5rڅiШvkTEHF\%<ёaEK&?s];VXzzױI뷎D%aEyo{QcVVOc^e^ޗ֩z;e8g?c-޿N(Ώ GȗN$B=k/Tb#Z7]Q&ktyVͅU~c>ޕB\קNnQ[QEQE*V ;W FGdqS+Ы//u/Tmg`E AEPEPEPW?<@ #^voYd]20ʰ9Wź3C}m1އusڊ m}^O f/8cBT^+C▐t ( (<ec\ͧɼm) y-o֛^˞66}3_F^Eg=hz0|Mj6R&N2+IU*2yQTG-dxcW4HZxA|vqֽyi;Ӻ (Š(#⶯kѶzl<:kƾ?>7ӡeP$p?~7vij,W8s~ƩF ˫t<!Җ+=(((( |ħľ+)7YШ߉cҽ_?۫xpyE_816 (s(((t!sS9rC\Mm1+튂;;d>*s9ckZ%}ԹzÊ(s+:M72zVz3r}MqH9%S_Y9Wݎofgc F՛IӠᇨU*ӅX:sWOF|&%(AT%2 04<=R}VXJk~EWu׈tȗn$kHh9(Wdm g>ֿEGGo5>c69h*úإn1W=NVd`p3 1yQ}qU"zKL[E#^Z_WRYRӱF GE 8ʰ-m;V-av`<NmV_ٔWC\QX8>E~s?~:?33 'J(((+WzIOGYTRTi^C{g ջdFúSט|۠ͣJ߽mdOҾZ'J{T #4KEdXQEQEQEɤ}űƸZ/M:˥}|,gW9)JUف]ya57gռJv'_?5ǫJFtD͈۞ܿGJy>JԜ, + CKU5+._('P݂>iZvUg0Ae^K K7*4|Hg1_[Y%cƣ ^b)Bpa=dQExxQE2YRI]R4M> /~jf-)>#5R+ I=QEHZŦWӜEoJE?ʄvA5/. >=1[? ʱ}w.\^s44}z4:jQEh@QEQEW[ieDдy.ak`?((c$$Z>|̄vݗjcq.DhSu$ej%ISֳ袿[F5d>*IUaEM($uU$TNu*è#j%'М$*r4@_قyU6/P~N=EyXkG㎫ۗW_gsE5d]UAWm4ϯNcOuP:>Sڴh𸚘jM٢*ҍX8Ofy8 =i+ow0~Iz7XOB5E PˡwLk |q])ʰ>wQ?ʾs2mOtzN3^{= Q_JNl~V@;Z驒FF20Ez9^a<%V5[ؼ4q*ݴ,*}EVUX*wOT|\(I[* ( (:ok>2vM鵸p tt+_۞oJ+Č5放OxQEyxQE!8ZAo!I-\ ŨӮṄo}p\h.dݮ^*F 8j47~:C֚m;5ucm>M7TL,_[*Orr_,OfKdQX_х}P:y-zR Ä|L^=k{/j ,kOMu [=zV?<բ̫;SlYhxG N%?_eJ69[;IULkJzvF85jw(8 ύվζRaOsu YxG}>Gz8ӫKdgZ.Pi+=x~7:mo#YGO8+~oX6.Gӧ^io!X ]$zM*Q9pg 7- QEy'pWsTDbKRaqy^)Pߪzp/#.RyUW#n o->ǡ⌯T%'Q珱oBQ_ {DsC/ ({Gx>ֻڲ⑮ڈew;<_ӑ7WCO'9篽'~jDw:m,z\V~l/>S FA# Y OKUv/-Q^ƞ/ |##^ҹoiD!8az^9e:G_=fKoQE}EPEP^CT4KJftakG/ApqI xT~uˍ= .yrG- K_4{PH*Df @*jLPȗ׷Rn&b?]}FV;y7j<0TfOu#3JK+xro:!=v=[ok뛑u~QYW =v׹[BT]VǛOQT;ҖWzAEPϿ셷|8BG%#sj[-ovp=v6vG~m- (BB~}K=(WcuxKEL??{xWKx~K ܻ]z!|1Nԙ{en>C?!:•?tW8|ٿ+鴡!(~@̚D>'7*ծ3%䤰7~qI8Hʢ+<Т((Οoaw`p8+as}I:C24E~/_>&Aϻ(=_^y6n /v֧3wTcϧsZ3>)ȦGTI~5{ijϒ7;"8?κ:Q@%~Ccʴmì=% (dѴn20EqocvзN}Emɝ\)v'/SB,$Su==wa$8~{ߟٝ|5xKޏc;ڮW1'n$FEb)JEtYȸS+Ҿ,$y1'Ȋ?y|Xbaש}#tQEyaY7($vӖ?־>0|}0d[w@.|;^:Wy@ds!?wskCh(5 ( ( (KM|,,#}%_[/iRc;!vǮȵeKIO}+8((nZ+ܛuB~gQ]]~cqdTo̦IWŠ(=0u1=KuBa?־˃j%S8жO93zr1U ¾+gA>ǡQLE$yWPߝ>\]& d0_D]`Տ<=i+W[Ӎߚ2v=eWLM)QtQZ1s’Ȏ2 ӯI֒}:U*;A\LvMNةsX:N%qrWrkz;lm V&>ߕZc=J4V (l@68(UA\6y+}OrT*M/iu|v'ϭ B^IHcL~'zv x/?S+B(j} ̫ĞfpA Fa"ア>ӯ6(0 ( (> 'QsJۮgA1*Tgx+2((([4~g5 0?Ҽ'Ǻ3nn`^ľ֔bx3?U`5zG'ԔRQ^-.dzgd1q+=l?Q+?91D(O]^wixcӅ?ֽ tlWkGqfƮ-~Ұ2n~̆`p}k0j w ::=˟b@ 'xʬ"[*io2|C]dN̴Z)3KHaEP=T/Uy&M|_`Nl2GoRȯ潌5y%Q^QEQEX-3vF޻AAh;B0=־?0N8/Go&(}v6(sڏ*+tx$GG+<*5-62(wQS= 9SǸ+u#R*pwLEŸs;|[[ӤђEw)ylчOC_6VM{>)ܴʴQ-!QE0 ( =袀>r_s1ՉW?X諂3h^Ft򕵩/V{tRfiՆep (H9vw4(@QEQEs8!|@c~ςx? *xY-@$fOh bWw Wcu>hWlg$ %dj_pmt{}LTe+fCxZ2ſ4OO+\fj؟H9gVH;$VuK)laY-6qO{k m/WRҬv)0\8jax.;|y Enr 2けkɚJM#.LC־Imͦ[ ̑ E}lk/Vb14{j{Ǎ^g3EWyEPEPSZgr~e9J5"5t8e;i㺷I9WK\6"C]]~Ob]?Ox,RR(']mF!۸Fu?>tKN~Ҿㅳ_|7|ɭmQ%ϕ#&S{ɢ*56iQGtz%j?j$o?1Z3 S ZTjniBkSU#(8#+㵝;7[~C=fWy{hO\4мx^,D6Fڋ\Fz1z ZQ `~By{ujdfY I\L2p*:|?0UQ/za{엙˃֖J%MIFhqE|Rw`[Q"L׋4.ûs^8{]Ɵfkξ[=獼}8WpspV}E&h^W~]]ɏ>?%zpl -o$s)N\h> y~(=%=ʲwW ϱ@Il,o}q⾕+3ߺ2ӰR3^/Viju;~}ϽrС:創JH74?ڲjE [#ogQw-O.F{~x#us~il$o>u)az/}Ӌ|8کidyG~k#nXٹfeW~5Fx# s(!p+2mO ~Z(Sp`m]mx ujVfY*2֗X+/] ^zRgQEgQEQEQE] M}{ƸevWI:v#b)NWęW֨zk߇nj{9|/:(6>+o_-nQ ]mLx֧]1#^.ZZƚlnK"!T{Vn=.&*kRwLJnSIXRǀ+iIE9KDId^4}wWgUt$XWusj~Wfon?t_>/,=+?AŠwab$;ı8{4<,.$pUYFkPQ Q_.QEQEQE|5+I׬|7Z% eO?:OTHҖt= c~+|;N(_X#}sKM:KYe`lU䎜ז/ l!wd|K}@5߇FpedsU%.H+79/Hӑ J4w>知y֟jچ ˏ,佼,+ۼ=CBMjSv?+`(aQ* LRϗ_^GUDI&l5%`C8=%]J#ΓÚ, pM:us&:5K02ZȨ?q⵩ |>j:=nc}}9OPki^&6XnW_Џξ^5_7y,le[lsFÃvr{exPHx-ەff:zsIk˅IB~V5TUPT`8ړǥ#:bI=* Iѷ,ڜs?啷XdpԊu9dv]|12zqݞ}i,Ri O9os;>TC>k_ jˮxkOԆ7O ~?kLNT {J&X*ҿ/iecV!$d] ں>= u&[J;}8}p+⤺}(QEQEQEGɗ쒟P]Ey$A vzF/b<\z>)%KGz~ee' (0CkZwخ ̇++}h7R2c%?ŏ¬E+-Gҟ4/NWђMj4D?acZ]N?0w0)4dqkN"ʾ_S^g/WEW#Ic)"C:N|=Ӣhc1Tf~ͣ*i♗&\AL=IjUqRMvm 5>h'QErEbk,M$1]LexѧsExЦK?nڇ1/(0jxj1MhVUf-QEQEQEQEW ѝvx徍: KZlȾ3:Wmm.@ JS \([$Q!wbx ILCú~ Ac-+'Őt/m)~8g>* ( CKP^\eg=CH# Cڴ!?5 l>O$a ߋWγK.$ Oq!sJ]7HOmD=?{F /RS-bZ+;>~ɦ}Ƌv {nOK/]]SY{I=O:Wڼ1o"D~<OzӼk# >e~R?=*O:>ux[)0dD㑐G?Z/~0xR3 7m`+/xNӳ[1 =9?m uY>ͱʹѲש+[ɤشڧ+@.5ɒϲϓڲﱳ{ս׸]\0?=s]k@6-ơ'p[ONZlR5L}z^jqrQyz}c 6v$HIm'$dԙG&7I-(3>32ؾq&#ѱ7a /ny_u6kUFy~Ydf}~O.(xq ;͋q/΃qW1^@#d [HV%-nNA:|?G&_2s/elFVr1_QP 0B{zQXz^ݸIsѾ# =s_cpu:ѷG} E:(qbPEZ7M*8Q?iJB "e8sI {vV;iyYYMZԵ959X/5fA}B=OK%)c~;G_QEhQEQEQEQEI2G(^Y]QK> vw̟$ Al2\lo QsvZbctIXXu_1jt{4iA >eL_#C^⦽9o`>ΜX}}qQZ`i{J-Hϒ=G,85ۻd{d\6=r;^:Wxo$}ZĢ4eP0>SzM!WObiQ!'z_h(TʣoIZ:(ϊ:ol=e~ot5vY߫yvhn$o@ߝtJ_?Ƽiq_oiPIO ƾ+i[5=]3ؒw7u#oT Sp+:( KMk@ӟgc?n.4V+\ٔ-O .c}}^WSޕ7CE4} ŨװqʜaVq^qs[$lͧɀlwW֦p}s犐QIȰ8q! gG{8dU>x\ŏ xsK2Tr8c?P=k5oHdQ6_E",>ֻ8%MjvS.S@Azeo-FEPm6F)F)?=C7R?ZM:HYktFU'(xVhdt9 =A%x|O? 5,K'Iz׾Ʈ2 \x;-ޕUQy򏌾76p3%uB~V WT7V]Km:T(z2?*]*hS>_᩼-&ȳV }Dd(IمQT ((( A$%7_5 /O&]M}>s}n5 { _ʾhRьG4=c%i+6&eM}>s?fRU'ݓ}~&kPGi>w$cf,I'>UƜ!' (((((O=jk){3 R:dzWiUַ[iiy*/>dԚmmP&ܑ}ɯ?0{8r-uaisKҖL׀z?2Fb=" .5=_S;fPᝰHν3BɡSM:c?QG]^*tO+t$_"])s it=@N_+~ 8?i|k_֦<|.KKke)$NO*z𶊾͆ _#XdyIIvi8ϥ|`+uۣb*?{]lh^ _lsH.Wћ& IaA~\ 1i]docx6]/eh+E Tt*ssvKHV!P06ğb;s{^e7T:$r"9G?~ËF6,LpGp}/ )t.mP_ЁUωqZxT2 Vf g_6.=+~![=pt(EyQ@xAhUdsOt>_6I+*2HU#5^CcQ'4ؾuS/r?e-*2TQE{gQEQEQEatI] b{ޙ^_|5j?9+npOArzzu+JVn#枓ZXN4;>5wp}{}ۼ7ckUj= 3FH_4?#\x:gRqN\:=O},+f|uivgQլA ΐvZ.~Ry`{Sut4)I[#uuաV"|'[ஒJ?TWRE39*ޠ׹|SV}%ZqwoV~ҵ Is)NGx3k옅<3@S'H3VѮ֝u%JC8+c?;wC)ޜ_ב9RQŠ$eq;'!_`>/fͿw]}c> ֯'5;ݰ(`?שAǴڰ8\j%霯ڤ):+Ԯy[nahL\#8 =7MV(@kaݔ`~PVW~U)T4<Ҋ(@ ( ( ( (I]c^ŝ>ݿٌ8A5j9Gί{1£-Z79=Բ<+ό"~>Zu4 =Gu5xˣu}yz,{!}1O&gνSw~!h( Rmf 1t5o~k~vnnwаߧkSޥv¶f0<scUXҖO~ Vv8d>:Z5ڳܦ-ҽ跚ռ84v/l٘<[O}ʜǽ?~usIwj+f[ɲ@ǠS_QxoE@G9Ic 4h QҖ+=((-|8^;o[1 1r?\?#ćO E}?^ijeΟt:q־XZ7-Ŵ89VQ׳AЗO(":)?^Ft8q'jʲϲ<>𺸊&¹󽿴<=z_֢/9lϩ|6𳾥d|3ڿŽH^xuQ6ʧJdֹ15Zt+JMPϙ(RjZ?.%X@<䯡 "+];\6z迠^mT~&u,3 Ɨc۝]gH1?|^f:g{5Zt-S^,tL|泫O7 bhAVf0s j ]Qr='ᯁn/5Ƶ0/0 3aW7Ķ$Q{',cG $=q{צi!YtBX#O3iON3GQ޼ x-%'>^vbt:+RJ QEAEPEPEx/W.Bht$p?_V?LEOA.Nț~ n@i03͏b~+[X("P@PZMCaa!Q_9ʼǯF1qFk$xxfi{+jwDx}OO4J#fwkw[Ѵр^5pYAH*^ׄ^-+>dm|$Fk""A#+8s*'^"iK29aJA yߋ>iz{(zyd>?QjL{R:R惱SI-". _sFWчEz_>1ϲhtqݷ~PlKGȹz?e7r3sm;{פ41+r:U(v={yRXe]2#KY^;ܬ)|c{u-kVY=6;U]v\Ou_z[:5֧twn~t =.^[wMww.HpG-?h_ɋh-$էBm828O^:V<;|5k)P7=OVsb{jKn)8$QEsQ@Q@Q@ ~M~!Oہ}?W KyxNS#HL𦃣JAA.?Gآuj5g'a1GJ3Y^ 5 BM HݕGsQ;-Jw4df !MGʐKOUۧҽ&a*pW}LjQRY\mu ( (>?"_'5_F /׃j?#^n⯩_P* d$[7ϩ^n-\,`}HHu-i=inrm7c[T(:ЧO~΀30Ubxr~B6b Z={kE;zwS] H1r7<Ŷ)W$d9 >خJc-Y ӓSǾ4}1XDr8*6?yk~i`b'?]ߝucrP~zaQybL׎WQVƥ2>r65֘J~ΌQ5Qecwq&PV ۲3++/iEW?>Bծ/Ǯ푎$}_/3ڴ58C$29ĵ!{󊩱8Բ±m6ջ/0h&>L/0{›d'eb} v5穊ef xu?mL5Xҗh4>#4C"Ռ)H(r>׮̕wKA/W B=_C5J>>֢ln?CJ3+ͩRU%7(+ 8bдns'c|рAZZxKOlڌǛnZnď3L@;ۃ~_ψorHFih9x/G]v\w1 H=xWk>fHbQ@|R2R`85ׇTv0MvgǿҊ tmdƚo$"&><xiۃ?4g⽪UNϱT:{sQEuQ@lT-,2Mon]{6-jo9yEKD-Š+_C92I8iHkc֔&4vFEooϊ.[8{F#Oǹ~7ad^#%b_v>6 xmH "4P^f#2}Ze,#z!H,}P72pW:.i;1QVRgBg=My_~)ys77H7'o~Thά`:F5+I ږiUI֝:n}:We뎕|!6 _j7]7ܟ5?ַee9WS2һ4 9&qQ>\lj>>(O{u}ݶ9[:&Ƈc ڷ0sIWόNW:ֻaws &e?y@_@]ťnv[½$ *TtȌא[F?i֪ujU~lQ V,_?|@d?pͺ+2??1 ` t4 [ 3 ?=jϧ$:enSh =\zSGk$sU%N?3P@0q^iW滺b.ǀ|z[7$ [1=Mvqx.l%Sg|1Y{t6M /u?g J8znM>Y8J:[ojb'#|vU*sSP* (,(((((*+x Y"J:0e#Ǿ ZX6pK[H{OX>Bc6[9?̟zWB6|eXuF_3x@Ƶ&x]"^ RU>%_:%٥5guԢҼJ;58#ϊ<-qejG^_cPA<<G?8={9\_>^)fV6z1!^^ץtaAѫʭ9s* A?x:ff<ދ2<_?x˟.R0EuDO,wOs3ؽ٘=+Ĕ)e%fKiߏJ;Os3oy@;¾Dž<-3L畽ODž i)cb'faJާշ\[cQ p+ ( ) cj .ѓѰa Xd4(׾xk[/*PO?yo^,lj1HOȜ~ԘXNxzsգCJ4BA4esZ__oM񤱷Tu15𞥖}&(\1c~S"84Og%{u6L^A4k'\-r2Ma2ˡG]Qa,5U*+7?%Ss;U)>!'+i7`'sоwJ-⾥8?wQAK1q(¢(aR^}J7s-!8]U$fX+ց}$,VՎLvN2xJ"P~%a)'x4-Q-ۖg>L= ?WŠi-1 рoC_Rc5| no`Os*»XٜM;ѴBUӠKo:G_O{W|q05ދ(7{e:%BX r|={} :m|g3֙ 'Ƌ)57+[_ 5 3o2*VU)hOoO F%A5k7찷-m|Nȡu&AWMɫJֽUc@ovq\G%̿F¹H/ZRx]$N;ok9&Xwp;}+TRiѲ&8F3]lq^}3wX=*jUGy0⇏j665)>VϏoݑSO/mk!|AQ.3A9ߵ_܎ rZu*4dD4"Dҭv.r}I=k'~𖊶VKp3:te{iZ? 4jv b+ ( ( ( ( ( ( (x-\Gw-m8zOqEtUBr%f|}gsY{yĖ֮ ӡҽ5: xK?xab:ޫ:RްbKgj#nzW/JD7\_b;n{-dfV?v@75 ((((hy$Q)wc@&fufo;7SϨ^1_/B{ 'ƢWq4k:ɘʄF_ L"T.U۝X B@g7\vgJyghfKWoƚ%QW{y&^nqafLޮt-:it.QHN(JZLR@ 1KE&(-PIZ(NM#K; |,T?1}2}۲vW4 ';טxk|]gqZ˼!@9ֽ?Uգ:RԘTy牾-9NFo;N~5.( |t{rk8sݦ<򣗋_k1/w ;ۂxG;^NwZo%*z/-[j:ʍ @"9$~#>]hmum  vee'o:F>:Z}u.RcXKB:Ν4j8SzWG?l?jrFQQϨY[6sZ]IJ̥$FA]x$O gr88G)PU/cSu8jПO :}LC}Z n薵̞o_Ɂ?lō-]@Tn# +V'cE{>h^\’]^p>}沝IMIݗE \|kg;{P~oIz(Rx>ɲj-3/;ų܆y..$ҧ`nQd<<>v)?ﱫ>(EyZ^~X8 ?=+g4|rQ?u<1x_R6%NB,l9'3K:UXF;G_{\\H ܒ#nV*teiԪƢ%Ȣ4 ( LR'uV<)j(q$P,9W"bWQ7evxG{wƗ"&-ogʟ- hþe 9O6F\W:\͌S@yF[kҽeko.LH DZ<;|6xChfZwIVvQ[^+巉)Ɏct?NؚD5xexfs :+Aڍ:x1V39Ҩw>eH%juH'@^KW?cp vr8q^jr:\_6/X~۰КⰨԴ,>ղԎ3O %/.E7J_AaugRZxkOdWvMׁ^5t{bbyf O r:3TG7U"ʍxwM-py+Rc=Z+4]M&-,mc!%ڑT}*q($Kq8_,- ZZ՘|g+u{tȲOd{'&ӴKz[s3zԚi[Dqܧۉ/kIZk%ڽÈ<7jZYuf^`ܛc;a;$\Iqu=SWeK^ΖߞcZ(4 ( ( ( ( ( ( ( ( ( ( (%n@9S꧱)ӺI3:<++\úK'?gJjGN͙-dn=ʟ?}-$i*2HH#גLdڬrؓo]=z1gyA=~+|Qd'ӧ?y$g^*)-T-X[2Џk#˳(A?VXPjҖ)KIWh%He]֤NiRk~WtE5) WHETd%%M]X᾵iʆUkyN0O fWVEe!A~5Wi 56T~dV}@Ҹ-+⏅W+q%U'O6JB*ʞ.#$3=u#ۮವE|{=ߍ|h >r1$kgԴ\vBj9Ģ+D%1jM}D:Wk,Ae$V1v>}^L5C+ 2GpP*3SRVx/~_kͫIߣ?zkSyq}]sfw>#͸aa;yϪ,~^&/8& J;sC5ƥXWj jBT;/O&#G tGᝧ~Jxi?'b?B+3.j~gejiCsoݴӠxeC2?*ޭcwI nD7 ,sI]ߏic$!ݏ IVi}~eV 2vO\zzXhkZEm'>Y8N78m'dy?~ M4w[sM*S.X+sYtů5+'>:^OZK;Za8(?Z5mgSB[;UqU{}z~\^D #ۯҽjxz8XJZ,4G?j,jUKu x ><-kvYߗ:Vvְ00V+wmc4Q\EPEPEPEPEPEPEPEPEPEPEPEPEPHFihw Wo 1G _ýg4ftghlק})HJz]x|eJ:-Wc xT>_׍u H>s؜h+|1GBp?}qN+_pj~iɒMa^7$"'>?#^5 k>f8Y85[ I~?N[7!k+7?i^r꿇^>"fn[g?'~xJ駉ٝ(69RXH]eYNAƝ: o:GQϴad?aȥ|3UHrI'ہ/-'_څQRQ֤7[4koB.̗+\Ƒgsidn TÑW4 cHe!q@]1>7UO5'CgF rvf9SwF\YmyeTl~|͌x{o#Iy'vMwsm6[֓ƹ17vzgoFn$o^6*aԡXzrV-!KHzאw.Ǻ*cmlZt|MR$iwG GC^lZ$n{qӌO# J薊(80]}%#\ؚXu +Y I_Oq_ZbXZj/-Ic ?#]\l{]ꮽJt\`iQִB(P`ږn)3Hbf15xo4{tԆ-~y9v2b&vYSt/ yx?=GK_NognN?~+?xæYKrckҥYsVv_SxM~)-',O@GmտQσ5Kpp2=ϰQ ZqȷLzt0Eo C iH0 t&C 9j%H$~רcT|ǽ-NKNTUQEAAEPEPEPEPEPEPEPEPEPEPEPEPEPEPEPEPcdE<-Ѥ# pjJ(EEO9n;TnW?yN/wtV--o~ WӤfWu­=橅=VOEFL&sY܍S^|n#lz晞kC7nyE{SԁA7־ ꖥb_W_b?ν/ձ i[27''ɺhlԴnp?F:xZ.ղծV1,DK*8ƴ>-xvS iv*:,bo#Wa|bY76P+x*78rz cX&e+ߑ2+QqvjɧRfB4Rfii3FhhG ?I71w–YOxô(ԟȕHGvwYf[SvK!v{ c+U_+qOgY[q$e<- %#VFu-J#-FI5Dv5ڟO+Ȭ4GW/:~5h5M~CO05+]]z46w-A8"#:9/#uΰ'w##3^|.֍G7Z]w5,j*`S<\b8%'z >po%ecoҽ2- SK^mZ*8CBb+"Š((((((((((((((((((((P^4C+pUAWUm][sIo#KS|QW ]c-m/XeH\*&;8oukyWј Ƽww0C WK2̊T,?Im!pgB&hn~" PLo?^gFuksrUA.R?mԯ.3K;8M}o,;++j: a hС՗#='Q,Yoo㹑W-W!@JE3t kǟɛ vz_ Xݾx_һ,R%L]i#xЧı[Q P?Rb6 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( (?B C dcesdlocpngp D6E@RX<Gdcesn@IH%%  J)R7J)/R7KKKGdlocGpngp-BD6E@@RX<BD6E@ RX<BD6E@RX<BD6E@RX<B  C  lbt D6E@@$$X<G lbt#*$GMH _>6_>BD E @ddUD=H _>6 _>BD E @ddUD=H _>6_>BD E @ddUD=H  66 BC @2022 ij  P! D E @` ` 8BC Ŵ  0 HŔƭ D E @ ` ` 8H _>6_>BD E @ddUD=H _>6 _>BD E @ddUD=H _>6_>BD E @ddUD=B D6E@FRX<B D6E@ZLRX<B D6E@RRX<B D6E@XRX<B D6E@_RX<B  C  osg D6E@ZeJ,J,%X<G osg#*J,J,{Jm>Ȳ. X tDŽ: b1.jpg X l0: \ 596pixel, 8\ 842pixelL@ cip$cip$J,I,$%%?ȁ?Jd;?ȁ@S f?@??U {J-B D6E@RX<B D6E@<RX<B D6E@|RX<B D6E@RX<B C dhgp2022. 5. DE@` ` <Gdhgp B D6E@RX<B D6E@<RX<B D6E@|RX<B D6E@RX<B D6E@RX<B D6E@<RX<BC DYP Y|ǐǬ 췤<0 D-E@|` ` <B DE@RX<B 9C  lbt DE@bb:  0G lbt#*iJ NE|M H J J J BC @1 D E @80 H RJ RB@D E @8H yI yBC  D 2E @8xB :C onwn DE@RD<GonwnB&C1. ũ D3E@xxH<B(7C- T 1ǰ | ݹ 0\ ij | xǬ !1 D4E@"TB/7C-4P!D t  0֥ DՔ\ 4ɷ T  %  D4E@Z*TB&C2.  D3E@2xxH<B'C . : 2022YDij ij  P! D4E@*<<B(C . 0: Ĭ}Ŵ̰| ~ 2022.10.15 D4/E@rD<B$-C ; |: 2022D 8~9  D)+E@K<B)C . Ĭ}): \սDž0( X\ Ĭ}Ŵ̰) D4E@T<B")C@ |. ư: 20,000,000(VAT h) tǴ D4E@6]<B &C`3. Ȕƴ D3E@~exxH<B"*C@ . \: 2022YDij ij  P! D%E@o<B0C  %P!|: 2022D 8~9  D4 +4E@Nw<B0C %P!: P Y, x, ŭD D4E@<B 0C` %P!Ǵ D4E@އ<B,0C - ij  Y   Dij 0x P!(2 )  D4E@&<B 8C  lbt D4E@nG lbt# ػtdtuMH NS NBC `l D >E @RP H  S BC P!Dž D >E @R H IS IBC ` D >E @REH S BC ` D >E @RH S BC ` D >E @RH S BC `D D >E @RH NlNBC  1. D >E @RP H  l BC ij  D 0E @R BC Yյ D 0E @xR H I(IB;C ij X 0  T t`P! D >E @REB;C  - άX l1D \  ‰ D >E @xREB#<C ` - 15(1, 2) (|x  t`P! ‰ D >E  REhREB<C  - \ͅ Yյ ‰  ̸̬ D >E @REB4<C  -  P!(10)   (ij ɐ 4 ‰ P! 8 )  D >E XRE REH lBC 30 t D >E RxRH lB;C P Y  D 100 x D >E R xR RH lBC (|x D >E @RBC  D >E @xRH IDIB =C P! Ȕƴ D E @REB=C `*8  D E @xREB =C  - ij ȵ D E @ REB=C  - ij ȈX tt/p  \8 D E @hREB=C  - T (Oxidation) D E @REB=C  - Photo Lithography D E @XREB=C  -  (Etch) D E @ REB=C  - ɹ (Thin Film) D E @H&REB=C  - t(ȅ (Ion Implantation) D E @+REB=C @ - 0 (Metallization) D E @81REB>C  - CMP/ij  D E @6REB>C @ - 0 ij ɐ@ hخXՔ X D E @(<REH N6NBC  2. D >E @RP H  6 BC ij  D 0E @R BC µ D 0E @xR H I#IB;C ij p  µP! D >E @REB;C  - άX l1D \  ‰ D >E @xREB#<C ` - 2| 16 9@ 3| 24 µP! ɉ D >E  REhREB;C  - \ͅ Yյ ‰  ̸̬ D >E @REB*<C @ - µ̸ ij NCS (|x X 4̸  ̸  D >E XRE REH 6BC 16~ D >E @RBC 24 D >E @xRH 6B;C P Y  D 20 D >E R xRB ;C @(; ļ ) D >E @ RH 6BC $|x D >E @RBC µP! D >E @xRH ICIB <C P! Ȕƴ D >E @REBE<C  - Depo & Metal, Photolithography, Etching, CMPt` 0\ waferȑ µ D >E xRE, REB)C ; 8 P!Ǵ,  @  Ŵ@ X |ǀ  L D1E@CRX<B0D4E@J<B /C . P! pt D%E@&R,B"0C@ %YP | 0| X $| t \ Ŵ D4E@^[<BY.C %\   aD 0<\ Xp ̸, PD, x% D   Dt 0 0x Ĭ} a P h| h D4;34Ec<5&k<B00C %\  \ D 0 : Ͱ,  1 D4(E@ns<B 6C  lbt DE@|bb: , 0G lbt#*iJ TE|M H J J J BC @2 D E @80 H RJ RB@D E @8H yI yBC  4‰h D 2E @8xB"D&E@Ԍ`<B&C1. 0Y D3E@xxH<B.C % h  J@ mt|ij P!X 1x D X Xp t DՔX x , DYP(tXՂRĬ}ŐǂS| h)@ 4‰Ր(tXՂRĬ}ǂS| h)   X| t 4 h D4(/4Ex<1<]x<Bc.C` % 1 8 tǬt ` X  RĬ}ŐǂSX l  XǬ 0| ‰X| Xp, t  D |Ǵ̔ RĬ}ǂS D4;345:a4E<5@<B&D'E@,<B&C 2. 4‰X |x m D3E@pxxH<BD.C %4‰Րǔ Ĭ}Ŵ̰ t Ĭ}Ő lXՔ 4 \ ɬmD   t<\ ȜX| \. D4:04E</x<B[.C` % 4‰D X Ĭ0X p DՔ\ ŔRĬ}ǂSܔ RĬ}ŐǂS p| ƭ`  <0<[<<B~+C % pX  \ 8x l  0@ )@ PX Ĭ̬0t թXՔ    Ĭ}Ő @  Ĭ} XX \.(, P DՔ Xt D `X `  .) D4/08U/EH<0<WH&<B+C %  ŀ  ɉ X,  X \ @ Ĭ}aX 30%\ X, P  Ĭ}ǔ  aD <\ Ĭ}0  0 t XՔ  tlj՝ɌD P   Ȝt| \. D4/08X/Z8/E .<06<Z=<E<B  C  lbt D5E@XMbb: X 0G lbt#*iJ XE|M H J J J BC @4 D E @80 H RJ RB@D E @8H yI yB C  ƌ@ ) D 2E @8xBDE@^,<B !C1. H ) D=E@bxxH<B%+C % H 80%  20% D(\ D4/E@Jl<B?C %H(80%):P ļijX Hƌ| l1Xp, ļijX 0 XpX D4/Et<4|<B+C %(20%): ļij 0 0| D4/E@Z<B+C % 0@ P  0| D4/E@<B!DE@,<B !C@2. \(H) D=E@ҘxxH<B !C  lbt D=E@Z\\NH<G lbt#JҷZEtuM H 11B C mթ D .E @LL -H qsqsB C D .E @LLtoH DDB C `0 D .E @LLHH 11B ?C Ŵ 0 ɷ D .E @LLL -H qs6 qsB ,C 0ŴX © D 9E @LLLto&H D6 DB?C 10 D 9E @LLLHH qsqsB,C | 0 \ 3D  Ǭ \  D 9E @LLLto&B*C @(, Ĭ}at 4,000,000 tx t \X x h) D ?E @LLLtoH DDB?C 15 D 9E @LLLHH 1I1B ?C @\X 1 D .E @LLL -H qsIqsB,C ũ iXՔ P! l1  0 % D 9E @LLLto&B ,C Yյ  )H D 9E @LLLto&H DIDB?C 30 D 9E @LLLHH 11B ?C \  % D .E LLL - LLL -H qsqsB+,C `P! X 1D $\ P! \X  %X 81  1 D *9E LLLto&LLLtoB ,C 8 X 1 D 9E @0 LLLto&B,C 8 x% i D 9E @LLLto&B C -  )H D 9 ,E @`LLLtoH DDB?C 25 D 9E @LLLHH dB C @Ĭ D .E @LLH DdDB C 80 D .E @LLHB$1C ;  \  mթ@ P  0|  L D@AE@iRx<B 1C  lbt DE@bb: x<G lbt#*iJ GM H J J J BC @5 D E @80 H RJ RB@D E @8H yI yBC @ H 1  0 XǬm D 2E @8xBD"E@,<B C@1. H ܭ DE@RxxH<B$C` %H A4D 0<\ 1\. D4E@>#<B/$C %H ɷ@ \, (| xX 30 tǴ ɷ<\ 1t| \. D4E@+<BDE@4,<B C@2. H ( DE@8xxH<B($C %ļijX @ <ǘ, DŘ D ܴ hX 1` D4E@B<B-$C - ֬(, p, 4 )  Ǭ ‰ (  D4E@zK<B-$C ; © xƀ x0X 4m ̸ ܴ  D4E@&T<B$C  - \ l1(H)  ȴ  D4E@\<BV$C -ļ \ļ 8 : ,҅ ,  ,  ,  ), \ļ  8 x, \X   h D4E~e<5l<B$C@ -\ ,҅   \D D4E@u<B$$C -\ 8ij, ij, 8Ő ̹qij )H D4E@V~<B$DE@,<BC 3. H 1 XǬm DE@NxxH<B%C` % H 1 XǬm D4E@:<BE$C -H HŔƭ 0  J@ t|ij ‰ Dt|  mD hX H\. D4/E<1f<B8$C - HŔƭ 0  t tǬt ǔ PX tt \. D4E<2<Bu$C -HX @ U\ ƴ| X| Xp,  ~` ij  ,  ~X ,  ~D $X  ,  ~ ٳX\ @ 8\ \@ H \ <\ \. D4547!_4E><7<a><B_$C -P DՔ , HŴ X Htǘ ̸| ƭ`