ࡱ> Root EntryRoot Entryj(F+FileHeadernDocInfoQ=HwpSummaryInformation.I BodyText C(FC(FPrvImage 1 PrvTextDocOptions j(Fj(FScripts j(Fj(FJScriptVersion s DefaultJScriptr_LinkDoct  !"#$%&'()*+,-./0123456789:;<=>?@ABCDEFGHJKLMNOPRSTUVWXYZ[\]^_`abcdefghijklmopquvwxyz{|~m 8 ܭ  <ԩ8><8X8><Ȁ<ԄX8(8Ǭ)>< ><><ɷ> <-><-><-><3( ><set><1> `!. ԅ: 3(  - x: MFP-3D scanner - Piezo driven flexure stage XY scanner with 120m closed-loop scan range, low out of plane motion, and <0.6nm sensor noise (ADev,0.1Hz-1kHz) at center range. Operates in open-loop, closed-loop and hybrid mode. " Accommodates large samples, up to 80mm diameter and up to 10mm thick. a!. 8  0 1) Specifications - Closed-loop X ݲ<\ xtLj

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