ࡱ> ~Root Entry ,!FileHeaderKDocInfo HwpSummaryInformation.Cx{|zRoot Entry ,!FileHeaderKDocInfo HwpSummaryInformation.C y !"#$%&'()*+,-./0123456789:;<=>?@ABCDEFGHIJKLMNOPQRSTUVWXYZ[\]^_`abcdefghijklmnopqrstuvw}lٳ  lp 0 0TY Ҝɤ0 - ଍ VLC| \ / \$Ĭ  l - aŴ  ¤\ 0 In2O3, ZnO Ɛ5 )  l * $ (6Lj) - The Study on Tuning Tin Contents in Zinc-Tin-Oxide Films Grown by ALD - 3D-Multilayered organic photodiode for ive light communication - Graphene 0 NO2 ! Back-gate FET < - Nernst \Ĭ|  1X TtǸ IGZO-EGTFTs pH < - AES-256 Encryption/Decryption Accelerator for secure data communication - Flexible <(PVDF)D tǩ\ SAW<  [SW/AI |] * (1Lj) - Keypoint@ Descriptor| tǩ\ RGB-IR(x ) t i *  (2Lj) - ISL 0 p Ȥij 1 x Polar Region   - Ǡܴ RTOS  Qǩ * $ (3Lj) - Style SwapD tǩ\ 8 DļT - X` `X % t $l (D \ pt0  0 l - ̱ X p 8̬֘ ¤\ UMKA~vfbALx <4 l6bS0Ѓ@A*ăAzCfŃuegya6 B1|L`Ui3鲁'̧h[U,Gy/b]>a@@V8vu!8r+}>: *=" jaDsY9ZW"R8T{O`)jkRHxU"$Ta"dX̳,Ga聙d`lkJ${7IK0NbӰU\yq39iz_q'$2ᘻ3<2?;V4f$MCʔmf/NzXuwl[e%>E:d%MwޞvSH ':!EEС{H}E|M,ok_(E[$ф{$ժa5}XtlV^7^0WN@mEx1^}>&j|x n쁻xj߄|e9D"aHS=﫞7Jv4h(۱s]unY?gg4mO?{-1Q''NtUc3cAmjGVWPuD8U%?7dm8P=:J N7U'|rlkk殿N&jr9-;U:B3MNբa96<§fU,bxMq).g+dGnjyRWa!lEkֿ\^[xT+R-rXz,wE-E=|uZ܊$uԸ#r_YV-9Unz;G;1<9I*J(CYAd0\e~.RroAr0>/ٽ~%?2æMSnӍ>0^&<pJiISN+9q ^i8*@>};9T/KowO-mYi-DU5AjN7_13֫{l&sȺ/?w J5 `a``a`0x ( t  % x< ijX X@ 2012D 9 4| T֔| $ 10:23:35ajou!12, 0, 0, 3146 WIN32LEWindows_10@ Bg;@P ,@ Bg;@y,@HWP Document Fileu@DO 6C,H,#GB!k0~ 6*7=M*Z:ҙ#?*?ӿT@Y~X+mj3'm[v|:j)%C$Mϼ5#cd߈V]HW>3{5cX516ZjbAkvcٴy0`BڂBԄ(fW]! Vy`Z8w݌B:ٽs9wW͆kUA(Qlrsvl2 v9xHGIA( (UT5#O77n>clN>KL#WP^-b#޳qlM>S% րG\\#M5HH4TFUtk^/pse'$)(rS!vvd,{=_*%Q3BcK C%}c0׉a8" BT5IP3}TXS}m0W[El*8 U- [;) +ܝ5m2UauҀRJd{-5FqoBqMeQ{ G "H:(и\ycv 6.3Jắq>=p{`B7HܢJ mXoG)g&?>vK !%by%x쁉/3ݍN۞zGﳢːlZre$8lONܼGҝsHeKʫ}1B~Dv/U2A KGP\Ml4peI^j7v%rn=+ŃBt -\[}SVHз_-vhp .u/9<}-QxE~ s1Ɖ9r9G6S-Gy2j2M`JM ]+Ǻ2Tl%)Rme0q_M j<0Ƭ$ue֌$FakcMF%;`zNrKX$h!H =?(2Zp~N>oadpkxYX9YdG %&+ӏ*~_xfBa`i2?]4OVbRkH1uckcLx:8,>ħڰ*䪰 0W~L{3x"BfM?^I,mFR}ƙ1v.g˅GIXϝ[󵞯({&EПN)vcpÕi ,gӚsUL-"?7ngA-9!8(?A3;pN|w Y }j6/*[%,-C+?59q>_'ZfotdMbV]LU>DSm **5`UyXO T1t5M܇j0DL4 şfh.MWYdgg7`h }hM̖Pɝw̹9w"GX$k6VAdE,kGILL: #XђN;5Fɧz^MuP3A\_EmFX_ њDO_5wẸvi=q^H%aY8⡐OJ3.Y"q~ Ln婔Yz165lN,vd,)uoRˢrAJog{\~WkaA ĸQAݨH.\kj]32D娼T||&.[IFՈ%0dgZ"kڅ0W?챗[r=i#KT;34QyBr*/K#_^c3̖x3Rs>KM|>2fdE}ߋ v㽨F7xo`΋ڨlC{\{Qe:k",IA3xxwIYV ;=ט=FLW6sqT 6rl^zR=D{iQ]IPx9)&iw$#v.#Xh:^ׯIڨJ#vK#ٌĹ4"ǯἾƹ-瑶턹Ȱj<Aoµ6>*#V8sO\"7˼U,a^\])&i^Irbhv+m zg4ר$9gO58sAgSS82Y1TT\AhkLBcGϱ5^KZ4A!Լcc67f#;_1K(}:ZO..NlU>s q`?3Q9-aiڂSk:5YQ(UTR2:_+Xm$TcW+*q$l"huӁi`$ltv\]߸08^?f:NMdC-@zG^ }܅42P|&4!/>LKtR@ֽFQ#nkERc7k"ZVmo;o}>8pJ9!=нVguv\]8zF!yvd#>gi,C0ysig M.(cbK :^[aPhzAU nxp$t}r&5ZĺF1n-/=*8Yffnxf!~ avTO49iq.k&IyC&\qg #;z)b1-h(tJ'$T2Q[c턧Gnn~;|ܝCqMv#VA/]Xij#j{~ m2';z0D6('ȕK?FLk]^kd\);buZcFz,¸ܻ sZ苍~YG):?Q koSgUy?92sZVt#v6a MX4QĖsP&][x'$E'u+OlbWpd| =[/=e'Kv: 婁ᣠdD;d쉴b5''a(>g^8RB6`>o}!˧'3>`h%^IMhpp/:o>ñ+9,%C?- >prD(> .]5m >] 6TcYO7Od> +vҖ9:“ &~˩mzPX`}ޞ, Or(>`)YcoBR󊏣З cH9}:ߎG&eׇfpERy4${~W-,A~fOOɁ׆9Xry۟,/Cϓb;?Z''@r< 9Lw #duE3I <܏AB4 mrUFirrtP|@ 91 M+@װVy~'KVy'uРCj?3PT7;g9gKԢ^o^٧s `MuǕÈ A!ѦE߁!H{I0zqLb#xvGxKsx1w}? 6[FsORkv>Ɋ:Xn1Ə簿+°e̓y-$K~:<3ʢmqfŸ&r ~..LI w}f?Y|yÊBj8dR!wOf{s3P|P|P|P|P|P|P|P|~/^xu_S/^xZRP|WwJŋ/^WJ|?N)^xkJC/_)ŋ/^x_)p(>;xŋ+%/(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>&)ɷ$陴ݹğʰ.>/Y<58~ʋ*3:2C \!zRNz}Y/dqcC7iZK#d/˔}\4(V|TWuX; w*>}7 Msmw_]t }w? ?')cmw_'?NfOoAa465A%I>?x1->=´7Qow7Y!Ҷޭߕ>´-ѳ&݇|:uڴڳ5->l/9%Wϳ)Wʱ&˴ܙx2၄ձ"Ƣlɭѡhɦdz:ğ->)Jᴥ6.<|XS<׊Wp"y*8*>6Ky\~r?;?9^^r^g;B=(|?^g{3r: . ?},Ҿl8(gj EO#UI Ňj a}ۢJh`(4BPB!OFV|SB!)z{} GlM{u|V?aU ~w񡟙xy}-o|äHBLdҥJZ}lD|so>nJN Oe@'ߒD=/>@Z'Q\aǻ6G|~yIoZHRVrƟg~%5 BܑPL/JxfQ>j iH:dReP|/ϐz۵B:gU ցoö*&2U5F_XLY0rQؙlE=B#9^S~_ hC;gO>ƪᄋŇ#XVH|NuWMh[G nnnnnnnn~6዇]ڷ@۰zU}5/cыU*G8<+.}H=yrodʥ/t}wԺwJnJgcrJ 9ާdQTÞrؕ:Oﱬ-޿YCSVAVT,k$ Gs}9wV;%q¶;&m>{Ȁ,yKsBq k )`݋.v/"tUL>추0.$*Զh۸2>l 9+2⥸:v43B1ܜ@#JhdSkS3ܥ+me-ga{ >Rﶻ{'ᨋ4Qʸ"*!>e-{&}P׮[zӮ 4 ȋ4FE2Wvi;*4AUm'd)'m2ٍfGN0 aI>r ιzgn䈒!C\]ݺ7O ׊.LC|Qx)QÎĨwF C5piLPe{xІ)X*2T@1[|ɃZ̽gpCI|.t&A?%ĩs%|Bz1+1; Z37\ٌ(HeHoURz] r]O3"<]gˎw-.%ɖkslJOQ=G &7=]%R\w!iK{˶gBo/ɨxJB yn&Vr[8 2Űwџ6>DrWu$Q_L8Fޚ[NNɳyU5y`h}NRZ8߷FU)| 4XI3b@Rqz]V>m^HxJ3@^hJCLCK5zH33~R@tP)-.˶gBڄ$B%&)_8e,Fڒ2GSKr'v6Ysi"UkLF·W[|l*iֺ;EæreUMI{GPzr·&ő96 /c$O* zwiB"GJ"+Ixj3I+rKnu{d'grF%uOF"V*\)GԽ૴7 O {-iWŌosKV5RPQ)⶚ s*JnԜ&P\XkoD:HȧMsݍWz<­)߂#'&;1^iEN;/1/<0O־B;}`0iLRW :m`ݓ+kfAd%J&l}mGJNaPzt: dDP|T:rʄLZW9mR'Mz*m ׋E})#*sYE-"\+/7e𡶤R?佐Րv=0/[1㬳ҷɷ2ͤʲ)'ꢳ;|.8?Y3?\rvu!P|P|P|P|P|P|P|P|P|@A>W~Œ)㇯O|b;ߕ9 }᧽7&7{#SB ]P9rWIl; Oє$woo:P߻ Zٻ{P$|W4HJ'P|xݿy -d_ 5M gs}%a $~HbR y}bX3F~4w!,BÊZt7c(>$2.<-a}Ja~t_2UͤsaMk4-N0Z]卍DF.mhXWr])-ʓfP| i04ڞc.}?nFKy-v Ű鼁dOWb0v‡X*͖GD̔uO_+>$MmI2Il˫ epћԝ-fPпrjHkRGg `IHZ;L!u?@z! t7{+ "fPFKFM"/s I(Ix"Y%EI4$ؖ98O>jRjP㌍LRLDwIv?V֧LL*4{P|myIsᴣ9y䵬trwgBusXbAU/ B:_SÓLP-jXONYKCc);NH-2~R4˯Ǐ%AΣ-_YCt0;!i B2͛~ŇOߏ8?I{̲p~d\û&n"uVhN=^ɫJ?H#S[dޕI#9W /Fe}ᩈ5#aĭM_g>6R|HSrp[E0~Q$(>V(>V(>V(>V(>V(>V(>V(>V(>~ |k(> uNh=&Ij~|q˛~IJ^M~אT n+:2uCl5b:u4M&k)1f#,/"AʞބJQ,>j8 ŇdొuO#\U ǃBpTltjSt#|]߄]|'//]V {K}5jG:72ZͩjR<BOs =G~BqN$0o,[#0mF Y, aL>~yW?q'g)H~dkQJ0:"tg>gCӓR^&U|7Bqm^ B"nD*vQFlGt;F(W{6))>ӌFU_EY=uv&~j~P| |/fF+v*C1|th>g ?2%|ݺKl E(>|wo?{]} yyJeneJCYרP0ژԛU1[4Eҙ?Ʈx\/d{t=ɚxJ;*UȚNa@7_GJ 5E'\:j@!WbYZ2M35Ȱz 80( 1j(]~HNW?]^?F7@O,n91e&8&Gw;qkL/s/u3П §sB6e/aE&[.Ā!cBa`;̠0 : gS㡿<Ň\:^RI:?(N-~ 'Gf(2W'*~|NvA=5?ňZqiH>M(긷%ͲY14gD\at: ' 룿Fu-Ԧ^M^̚yt:@AMvVksjOF/o9>*A}i/py\ė(^ 4ICkEg#1 Z~*aHSiޞJ4#s ɬ6ufU-y2\c=іp  .afĪâi1L\|.35!՞8HT(F7y `+<PԪnʳI(>nl6 F57n'1CcP+HwT8 1 Ӓ"LLf3;ؒpWU'-IYKo^gEX|E.ə('gwZ: ۮdsۖ]"Fv<흯uf,]\&mχx2PX-tYhQ6d@2:rCgJUW#a18 #E& nbK5S6GY<_+>jp x=^A]aZ LPӒ8,vX{z<M祚Q&mjTg55zQ6j$1%Ŵ賾"af^ Tܘz 0/m%":ACC:FAϳ]sMrr]?jG"eqCOYaFgdÎY >N']Lw:tHzhǜ-D| wF|J%gN&?/OHh`4qPی+=Nꓴ?{;$FwLj by=x޳ ~FzGimt 5 ֳQ8s͡Ε'SIͥ _ҦLC(>. ㅪ6S$Ky7C>t-Q& #L+OۥɷS")x&gS_PjhܒphjO䆡|.&yaFQnrĖ & GL:'A1e>w\5TvUbPZ֢FJjق"xρΣFC-/b[v#I;n39$l k;}Yq&+iSTZ eL8Ndc+efɵ58ߡg3=8.t _+uZ Ϗjahcu7wWbhq`s;8@25OCh[|3׳Sqi,gʚ$vnz=\z(>'="^QEޢ<6%F^y`+\f56yː:^&"Ƨe >+ӗ FO|udϙ]Ztyx4ݔEݨYL8[ٷ=%rӁ;qr3n\'xp?+~;=??ʨ<ȩ۱Yx>/x/<],kp~96\ǐnudBT%T7ƻh:`÷B i*ToQ_[7s*zEaѸP~>]:gGMNڕqOͷgSpI {݊8OYe=9ܹpO(?9-/U󍏩9)韞'9`MCq : m; B/W%5 3줥hUdjtU٦Μ|{Nݩ=g4߁M-[bҗpkNzG VTCM?,{VS빢⛞!.4>-]_\չ̊1Ǧ<õǨLܙ_ b{8TЎ7Ky`} ˵m >)pЪɈX3 3=چ ;2.X\>AIY(!#{fvZ32uݕQMc;s_2!͟DܥsʎONóW\O'}8; gaZO~!Sʕb :+w ƅPPE,uUװMjTLNnSWE\I&Wi{ 2d]BJ.s; JdF_#"Nש4 SjuMWwBp4zԜ"f.@C.tV|2eВ:2ਲ਼U~3iVqv"E;f**&7FTNlL11FT*]ƫ]DEjY$kZDȶۊ# Sこ#65U'l$ĮvLyPwM[Ks;߸Qx2j\UkNpg MtOJSpr_μnT'Sʕxqj.[f7z6`iNӬSiF %~*q|2U, YNDDSrGJNbHU8;i){یPJC#v4g3Ngvs{>Fsa!hn= ;b- 5TMȯOP\Q?z P/7|u^-GbQN08DΫ,_%(pI6 K֚NVsVThW& |SGܰp'xzkcя:W^%eQ>q]>3gV9A?V*P|\cyLj7]I0 Ϯ;*2:dAt{^ypVÝZ8IGL89"Y{y4[!P톇S͡8TGROU$QIGd#ҫW#H?_t xXh=pH9⛣yutNTOV`@i8sve~'~nd.)jklAqurfx;O8(0ߙz/Onq.\PJ,Rс섥? | ̸ƉSgJ'~~r=1U:Us<{O6GslpoV3iJ: OOxl%cO>vөϥ^;>[|I8P/ϸxUnnnnnnnnnー?^gQk=/"_g2hfnņ+ 0ߵr8 9|uOpIG{W O(-G e&'C2zGL;R{/9&fhmo%}sn֎u->t}ԩN>J I~y)5KZi%w\(T\.~F!w/$٪IRt_v &hIi़H Nr4|nS9 2㴣DWz ƒGG-) ?qrOzUIPt]!?.w(r"=nQ$7}KZ^:D)leDѬItS4/) M->fJMaugwF6?v]!?%knzD!4%@m069Dc^1k6-jݝ٬ʈv>j(D͒U*SZ%#DCd0JY\w;-qzq唸׊pi|[ڬ3!r^dVYӔTF#97/ăGԇNt&J ;+UfUf8XWyk2ÕWH},)ܓJ_UFfCf*wc(DHY\8 +sHޥ*l|xzě6ׇee5e>E1ŝYWw*N 2>*7Ols-EF'XF̵|/(>Ԍ"Yñ]Ӗ+4L_ω.gO jV2Lâ@**,8˗F%5֭>mpvb 5C/IMɒ}n%amVcIoz7:yC?+JVϲHV"{%8>ծV CݚYYd,$>>Oj=v6{,oRl6Zq:HtU]3V]F??2~wLj9A0aDW" ^U΋Cbˮ0Xӑ[O?S%t{YXfjx͠Ds/zWT=kȁ{ }þ8b|x<.j7p+p+p+p+p+p+p+p+p+%׷Aq"XcǃZ!o 9G/鏙Dӏ߇=ZhWا5tzA~}WwOGfyY}3~n(>f/a+4HӸɔ8[}1FG:EԒfNi@Tl|g@]fg=ڛHFW5'TV#%uńDĽt Y:pq?p4 |5,26DNƟFt5;ɥX%81j5ATU^t ϕlt"e\R?W !qG:@o?OV g/`x,ݣ~[} LPi6|5.MK!ct7G48nd:_-ۣnMIBN.v@3״gfx@ct -jmwNh9[@ܾۜ 6z=5=a[f{b["Rݕ  $ふZQhaz _ŇOb!p|LS5SfCmlǿK &6W=cLJ ǧlvugĪI(ӰaZPM O zu 9E;",VqP¡_BfT gyVKׇln׬UX̓{kGוED7%PLi MX!"[GLl!y*; *d^74xTqCk:Ш;{ElBLSQkm[u>Ѵ.Ѽ:砐<ģLd QTIS-D%:^(QpP{FQcd;0<&p|S^eWRԜQX#kUufDa WDZ\$UDJk.Ja`yhE~yueX 3~%;;ǙѨAQe 5MycF\ `R@j3QxN\ݻ BÿcM *%m'doxuŁB- IKOeJ`}qMP|,i"&GLKl k#4c@4[R\;+JZmuد*ʇzM旾zNV/=ՙWKNXlӱo ٍ Gp^rI3YQg+\Y*hOȬݟ%)OdjcмrIS*_ΉAai}$zI&ڣf'l1{3j*O:=7D]01iaGBq]J'A0|ޭWܧ1'Ssp4=?ohӣ?4*%ɹ)bKw0|*WEԼ[vD^y.Zчܳ^۲.ryCӷV(>V(>V(>V(>V(>V(>V(>V(>V(>ڵ(>?bo+ѯj/wwv$dkxc&GR2K%oP2`t;8kROuw|_^ߔCFO\wLErsmm[+4:C~=uZ.7ˋ7O>¢KL6-g+Fg#=u#j3ONB[|=&(hNfjK VT9kxĭJ:TaTZ݊)%\hs(> 6 '݀%]Y>K7== [hL2ybwG/8FfV<+ #C5 ?O;[h~뷭"FUEw;'SCN>]Vkx}+8?.+C rHhh~vf_ p|.s~A@ï^X(_n~!U[@֥t|(>^u+Q!_ԱMLj\*Sv0}|o!cxO,Wn 5ԚO:'󉥇իֳ--=<^X#?k9m~V9% >t GQ^ Q[4 CocWr03u:CsHc[O"95Ngtb|ث9WѲĶHٓ!fsg4O'# &*궳f[QR "ke=K$؟]{))oJKGANл>:JQ/|1ۜN=Ox9YI\bEAsị p49dnJxsAd۫S"W}Wp)ܜ9< $0&a ڸCdz7 XA [FgyXQ&as5ik!КIUX$^ӊDOR퀯²sQW$Aflej&+aWO-TsP)$=K)vzl}3UٛW<:.# 3Iџc׍^-ϕO#*[}XiGz٤UX= !ԗ}^;j(irFot@R)=BKm)nceD$9gU ?=blΧڊ9iӐdQ7_ ǜxc G>tW;#1.]y\k„*c[3R?=4zXyD@RGDEb;*bP;F6S4:#Nہ)2ؽ[Bb2!N]Q{V9ܺٶ29:t⹢h[ljS+)bvaAfd5F=P뇴_ JD5@Ԇ+aBEܙV1&aFCjVM?㩚.TgR)2Œʸ6'8﫝) ;P]eIAu{dCVCT trO=9##yH7CwvEʄ*tvC+ "_Dt7VUb8ʶW+_BtThF;N-h-P|0L1>ʍ`;!?p~w# `[[[[[[[[[[P~K8\q(?ɤ3* ȶٵ7M OHʷ/8W2&1 ~θ4d냞;\F3'5(>\A\bzM( ?<衵6CEì/.?\x~SV)߄ck*DƸ "R`y=Ibha3$r}W7)&up7ؠ8r0pB)LL<*zɧ=.ĽGZSsg٤"1:"nep? 5jcČd*iZ ǥ4Y՟a/ HQF1QkZdlVĭe.X̛C;Pu d'/9_ͥud˕ggu}js^khnBŌJp>rFm>wAd=UV/qEVus>ٴJY:Zi4f>| :59$,LЄYtTYXZ%0QL{yKUvٚͥ[m΍8RsmLluXCGϱx:#XCf[4zǽZ]y10ęk۶q*ҞVQHټ-eb Aq@\i|xU2 eP#je[ԙI\cQm-*;!] &siV}yBFuz2mUgg{yk9F&mPp8ѶL&n~-mj}{נB"vo>w7nʭDo}j{pBBBBBBBBBBߚ|/)oVk 0߳+}B/">|ϓNVٹ ?)!x=|Lj\-LX(>:WSB=ςV>hV >;Avq^Kmvbv-&\uL덲mUɾؖk? MڔB䳞xjh9P'VA:4h]v '29;e(5` :<wܫ073O 9&GHh\J:FUƳ@?-P|HX؏/icsӞ@P"2ES*NJѾ>?PHhaW5l$֪{G3ui5|O ٨kSK/1=;L?G۰X(><1/FGy[!wSd#x-.5PCs$7A\YwjMDRRN{dl)z+ jg>bg "ga]\h>usn DV#$'N&Y{BU8mH᠈DTGSLB84,6ZaÚ0l6*QZm,c$ܪ1)TKjflR%*Kfo2@iG,q]FS1,9@̈́D P%-*3jj;LY)8nNut[Ul֞ ةjRQғJ ?|x81ʱScm B=7i2Dr ~g:d7) d⯏Q%sC=4J6%:<$9TFK{Ajx.>PIdvsf"_C%;EMEϒ*G2('25Qz}jjmssUO$u51(Q\@vz"\G=:W @$uSI( v}l־Rހic$Y۞DB1!FC N1!tM72" $< =Zyi_~g#1VՉi}|aU+nX|H"b5 ft}25([0ʷt&ES Kެ{^\Etec76~)KijұW5 t(>Kd뱹_%=* ŇCs60}rZ+1$WӱCYL7n,ҙs^^ca~+/{igTtV%@fLLPdM2o#]h2 ?H>G`hJw n CD>9L=)M׏' }Z%]ԛw]{ep?QU(f!7em[Yc"\-A0׾5ixA`1)[GB|5)*ؕT}]|>JlZtTSGdIs]sa&RE& "+{ wM3lX#qM5bwtThv=83n,GK)PNT$\ቆ9-St5DrEԲ 3"cU p2k/I8tߚ[LV|t>%t&Хjb[}q'M9M$IAi" UI|k&jIԼ>Q&S=e*됝 V]ޜ-jIL5􋗈5i?qipbzid5n?XHk-:0і N?l6H=Md 8X'anDTs.|60.!KH9󳧲Ϥ94LB_QɴD%`~-1ʵ-f;7"4<yޥ6چ ݈n |]z"oC`ZYh'$Q)v"jFQZ$:J(^u Qt–h:d{FC*ZO $?aI\CF%ٓ) ڷXն(X !2^>LgUC0UR`087гW1nkh#iV+e7y5e5lL7_@`,G|W 8qw^mX J vSyE*HX/c 4=Snt0$"4oJ-rШYy9[h[0h룱ٗSw<Y[+5L6it@?dtOT'>7(:`6F(p6܌!3tc?V)M"rx=f}{ Im!W }4;iS|\]$=,LU&JIϡP||W$4;=,X<1,d`..I&z$wnNڢQ||LBɹXC[[[[[[[[[o# ?&(>V/t_|s.ӟYQ۠W^݄jO79E^d&5i+8P?? )|9yF?.dq-ޜKsa{دK}x Q.~=~=?4 gM\ֺ#^/?~,D(>V=$d% :2?/Ow.ƨt]>^[4 gM;_XCX P|̑t_xBHSo_[,لj}~]>^I> N:֢lx#iԘ-AOqڕc*@M,ΓSKJ.$Uљ19YE7fúA' U5Ѷ*Ÿ?NX=Q<߸fkݗp'2? 9J0WL뤿DVU,Ea6/4x1CtK<0},ABT$YыԀ3i/'zZHƦ;ɶPitraI/**MbIXT5ݹġ4sML4]L ݬfl&Ui|Be7AHUW'zsh'RWr"/ToLm|vU4G!ɺO55? 3p Iy\nM!~uμމOld&^{C3=\gBZaf>05ʺƴzf;qdDzUWqZ o M F'ZɤGOVғq=pmh-gb!XP| ţDY-G>tki *GF}9|r{L$͈vPezfQ&uۉFX!GY3Q btl+TYCSXfVyuzMjuЪUy29PUѡ"nEE0{,TT@-+9p=Qxz[6Hl힫ҖU iP|+E0'^[޲䫪|C.?{-d%BCZ':'^;,eSJP [ ;C.RsmaeYr.scnvb,E]g&Ⱦ34^kT]ZK4]Y: fcI7Qtmu;$98S z@ &h[**s|JpFUT~Byw"٥ȶj,Q=s\-ַť? !^ﲛŗ MMBsF{?LM@nnnnnnnnnǒ2jkig/|_׸6+4:\fW^_W1}:?!MqVKQRo_mßwQI70qH'rY)j{!%ƮnzwϦa9ii9 lգ i:uMد6ZؠXvdץsϴ#j5l[ŇOs\F=guL!7v{w~h u՚G;Ί5;V] J,A:0xft!M5݌if >fԂ"kVjp4 P|̢iZg{KB__t1ҹaR]k=bbRCBot:(djEu>(aۺge1Cƪ%+dUN]OZ F ;U,DD?!>M47i/7)甡;oibdؼy鎐s 1Z^M*d٦͕Ψ<Uka\Һҙ˞u;NWUq?WbFg_zæu?=Ia)FM| ZFV6b\)HsX%$&3(;[""ZB`WNJ64j۱"=lҥ<mfVşurn52gȧCka$=c.FS$iSv1՗.nA?goh2`O>|h>lj"ARcU5jsh?ѹ ю|k(}M :]e4,.VpJv}q]׭&8HGբ51* T5 Ň,Eܖr۪FG:RMwG,k|kNݽ0 }:lgPJQTD/r1%nudff_{ԏ!#Is6 6s޶4gD2P|̢imPmvhoݷ]<ħ5WX?DUh$!>Yh۸y6t$QomeXaa3﵄֣`˞,ٯHkE}yo (>Ko׿YqpHci>q/>>`,9:=TϿ^p[f Xl$BKFF˵d{l"OA~,xw@BBBBBBBBBBBBBBBBBBBBBBBBBBBBBg~GF_O.>/Y^ߤi|yy}}}Er>O KKjz{E>^ j Ñp^/eL,?7Cꂴ5!W u\j)Fn)nehZ:zVIwF~W}~SK"O\[?0ˮM.+Eï,>R10&4-~J=BhmmC])>;|5|F# )J'\)>Fڢ;^'?\ߘ_T|4 Q?Lږ &+N⩦BA:jSo*>kǰœ4.ğwRβԘG+RF)>4ʰ񡼿|󾳢Y68}Gu+ղѳդ:5Gķ]򫊏͠Bܻڳܰ<_~j1V=~ y>jrQYI'L aŇ/RCiSbw٧_)>sT*m˅~;JWEGݍӫȈEǐ+"RES?T[/_P|7}ë "_ӷRvӢ2YAIC 7zY5~G )C#2xߒm"UEJA6P;z"<#ˊKOKN9(%OO.>BBBBBBBBBBBx\GC1's^g;B=(|?fۢ үk?/}OXS/hp3HUAz.l!&ݷ-om CP>Y9M Ň.w5zuGV'SŇ~fE2/*# 2_]~܍ ">i97?зJjvqRx*?$y-ὔv axw_>HФrCퟭ?cu $̇dz)V[5l%v]|<äʠ_(>!%>k! 3&TpZ#(W8f9>~}ibi,~8 ŇxM}5C;D_5pp=Kj3^=UE [[[[[[[[[=^_~w$|a}ǥŵIv5bwþo]6\w5ŒIgl\ O9|+.?@p!_dj'Lؖ%pI$-.TȵVŬ^jESk\m݉qe:a}kVC,'Ax{5G䱃ky [TL/lKQxtoŇC$4$t$)$imOwi2$"Gbuv^,Qe52F7LGEW%5:ri`>$eV"[F,uT)dORS zzyP|8hnC6iM0L$lJ6ve7C8]IDJ~tz,l$D^GvV^:}G(/u3֥dSgyܔS馓>kӷ3RxCeܕhҀHUd˪*zQm [Ә[E 154ΫBӐu5 . aݬbUNYDuJ:nƲ`fU(I꣐}*vT}ScbFMy}ţno0THԝNtӮ0(&6tE~ 2Mm0WCƼ&ʠgv(S9X/!R=imIΫ+IcUiikVLkopQ%t3l\֑8=a}N"ӕ)Zq D-=Fy]a8(Gz촕ݮ=*CMPn~EWꜹ7,raT slĈgF_̇R˄Co"a3 \X<@(3O@eümPtCnл_hGz_icV{AܡQw|$ݩ;2{uW6Ufݩ"̦ z^fF"Zede՜%|bc->g-VqƩ䐾:5[81ܵF[qyO7._| (>r!RBݓHwۯN50EIHьJ(gL"Nbně{;M y'NϮdv֡RJRl":Z̺KVjJvdȘ p}Dͷc1Es֦ Wzĥ*\=]@Q$|L,vBL8"c\ɶ^wl vڴq=@9~BLBc}UՀ2~LCõ>B-C&_^YwxV _zuamZ?aL7@BBBBBBBBBVCPlmZ{r7S/_XFbeډPR:߽oVUyPWJ du?u[~G4YhE-,BtuzGAZJ;U%E쭃:=DaޏA6/iQ_(>$wOoRsőx3d AW{tb>jo.>͓I&{=y%v?u.yNZrږT2g4ROsV~(^I9H eT#*CwM]gˋM '>9Oy@#@׊Zw8[L~ QOOB\fReP|w/٦@x$nD*vQl`kXwj=H>ةʕP@:;m?|?(>6Z@t'*zg(NR|lp?ی8G@J棪{ }[[[[[[[[[+Mg_|~{в_:޽>*򘰨2iׅ1;fMtG% Iہ 5v~V5 5ݖ_zV>okMS#iڠa{mSfmń(ʧ5zF ץi8Υ#EKhi,]|& qiœ+rfg9eG2LWT&bkNBmth.z}mwJtɭgp#[wz/ KzN0kͪ,45%(dZ, [ڱcњI~4s;KGqDDdN P|8@^]"6]CX9LFdhX{$U@Ģ]aOJe}ہՇ>D8>_h 4->d i<νɡLMflYz#Št1MRMQX}[O hU?V;fmdKkџ0B1^Ic>?cIcD/kG?v5AMg / BLJ;Ms{B0dHԴ61]e {f vSSuj, s[ƹ8i7=e 8Bwj2)ú^߈5]Row꺴_N]*vuѡ[~V ,Y'pH9+;Ó?|26JKyb'^Q$\2D՝{r. Hw = f6qeS`bC`ݫ-b{sQV>SsNO~4]sQ xœù;@ L ]ǼǑ $&YZZ.?PJDZtHhQhκQb^''g?R\IPB/.j]#q1\ѫ$m|3s -H8b)v 4Ov]q8ҝ<9ԧyS-뤯_hLXMJx!kf8pHg#Yk/ `Ε1BP|M1cwF3q5F7xq$"' I9^] H?~ 598ʆSGfP|܍]eS.֦̥z&ԷJ=Z,ɧ֧ٟDj 4`x*krt ''vO8 CBBBBBBBBBq3/LOeJ}כ2w{:D\;LE2~> )%cلe9|!tLf|99v_-INw,f\E٨RSq# ͊ ;yKN#@Z s $'"@M~l2Y,ɷI&mU %VIJoE65bS*I&HRD{μ)$,uruk$tr8DçXuڈ˛_S5[*z~iS  ̓t)t>FjǙC// J aûJgS|*Q?ͺޤU>8h0N?&UJQTX>kŇؔV3Iy3t @[d|>J岵$/g%57<:QV;4\/ڊ~}k<$7ӿNOBCU՟5#cc<8Sw2%2 U4S~\u>d4ߑXgl+KMG*bf0$k(뵓V>sáX}cS1LrM+oJZZ >HoZL`kՓޖI?sWSc'}P|+}p*'Lt()j֦R?!zm vHjw?%&7,$ʴѡ2晳ծڛӷ;"ABBBBBBBB[1wѻӗoe^~WFw?%?9&!޴ʳ*x<^G6*O֫#oG/%4;i4G!LDI UK|*:d6&%uYVB!鷫\b|bSJtȘojS/ʷS;}" Y'DxhsI!i  ]YګS'r|)ICHnو{f؞cQFW^-xŇݗ͓X(jsز(茟x?7^; >OJC oCdR?J:fW= %|+Bqf}!퇿i-%}P)J+P\~n'}Ĕ@SjX3CWKt4eAH`dTgp+MԒC&XTB7\,>zq G52\hh>g&Gi[@BBBBBBBBBޅ gP|2=:|7pWb0w*fsy+׽JpOY.5(>\jCRNПxmOASa%ynoτL;SE Div Q-aĜpfQ;ڢ*^wxb>K9uoSA֚K$n"]"޴+[a% 0SŬŐkEc-{f|QTm+@QbҜX6\}}:2עb@RRf1wzgŪ'IyMgihgpK@Q%% IAJ$G$sYM!V6C~YM-#t32oɠS3vOJOU4m^Trt a0׊,)Y"1)%ܫfYrASnhFQ"/*kg{fbl%LC뙺橷;E%NQŋͧ;$-exvx(Hf_'K$H͐a-ztM?~Q(w!6i< xM9o)b}.GtEA.>FBMWo>Ɨ,RY“g8 d6'^Ӗ;qTPGle#jjJuES~K0X4V),͝;;UmWcAsHjҌes6?R>:Ѣ?rٔ褻<LJT'`H!<|)wZ512y#1XzVsb*1k` ŇG}|#RSXC@k(4]rbT^t\̽Z (Ep5YKſ&E\3!c-$<;us;^.~eզb[|fVy$}g4Gњ[%x^њ-O6yف+)  _'߭ljI zV*5Mz?zZtrߩVh*pyD'~|2Sj 6Wknp3~Ew(7iPb^"ZVyK +!%bjH6T*i/ WØ^&@W-yL}a+ Iۧг" ҈@Hg~Z&ל=.9q0]~0nB1AMʱ!qtM;즋>`W}U:;[EN,߻$I?YN`?P ʥɁFN2Nc<~rEbH0*KҝhS'S*Ňɳ@_M;">b)mଷ<2XT!j;l&%hΕ2xpq`Twܧ8S-]G/F̮W"inneQ;@yUӝLlږf=@{?zT!K K(l+N*kaUҶ~"8j5myKC 3T$B R(c2M덝-73ddHoGhjմX_ F_Z!^8e$JLKrhhcB"_CWq>R, c'Q?êshF *Q_=<~f4z[GM"0~Y> ї_[/F`j[kqSSie΁^rsƅƥH:nix`;0x0k,#Z)b)!(!HY *i6eR2Dž/cOQu&8+K5ʊne5ܒ5Bm+`=;2mb\2"}A)+nL9(>NCjwOa⧄:-9R@Ey6-&{e"X7[IIvwʫ*[]&8fs}Wi,rVX abج9C`l=E#Y'%[Q ,w.:\.{ WcvQ~)b] :0zi5Q$`xvG8'L8]^,Mepr|z}G9Y%$88<|֠xM|F184~zUK4s8z4 DLd)w4>Rx8;Gp%D(>qx͏b]ܑrѕz*hQp")D>8^aΗe>p5{+LSu2)Ԥ54\ZO=-ciዟuqp3|          ӯPua*wYf`Q$+SEO(Vn9vxFUzI,.!z_62ˌ|`Io+ԓI[q1Ut\ǫsĪVHe;M{|Tl ! P|L,䜓x{m쓓3S/ih9Q>y9H/=5 URLTAIF?J%Rl-@1asXH˯JoPP_:L*|D* H LUi$eۣl##I9j9= ]e1fJ:@.O%[&ӣRQ>o'ʇɹ^F倈I"NL H',>l14 }}R]u퓏xs:J%iqz $2Rb&IwIJmՖed[FGVy]*ɕ69h}ix.P7!<ۑ=+j]ñѮq[uYP"9Th|l/"L<ccz 5a45z%)+5UjrܧZT,ApVLb6Cg-A)@rcU5h<,-qx *I3?ǚz>ORјk2KDs䥴w(T,C^6돲UUgJ25V-\y s _~'q< KN[bەf΢44'b*{O BoBqTiiMMwYi1?^|򿏷Nix,#m μN?oqiv#OW]O`w".-zRlu~\@ _!a)jP4@۸wp&tk*jv RC߳vsŇ^W1nɗhoȻcJ~r:"$ƶԊQ#4X@a+-n0ϻ8,J+,rN'{5*1kӣN$ٟErv'2eCe%Jp2vd|L3ANB=ʓQyDFg-v= :pmṟ̌@R^\n*c7]d{n)bY]n "]6 )QClx vM6q)en4Dn|b=NSDfq#@7U@kp6:L\MHN ViGGsݫ&$C7'q.]]{"ab̒.e❨qF+tc8΄9u"y^V+yIτb_];,sr映 [kZW<QC<*h3kA5Ţ:‹GQIlSyh\a yCy4H )7Ui96= 1j[.O?b.b&[@p|L"8 'V EvJr]wY6:@')ʃBYq1j?c';8aqg=TyV߲xu')Ym撵9dP"-j[u^aLG~t1WmHzOw}&$uW {&͘ Qҥ>LF >1ogLsDv8X&{F=ΊǥzԢpA/2˓d+?Q)j3N8LPVZ ˞WLT{4h]>(i/L.sQrx͙g9*)jPCpthK|떽aei"9YRU Rf)LV\^{GِD &ۿZL1Em{ǫ7HyS"Omż79]"Fqʹ&a ʈu85=XI:v*.]չ=I΢X'<;{t`\^Yf 2V[]19unfǥ::P%uGYڧg= +͚슏e9)>cyyDŽ(bݪRdZ? >p*jDJ r 9+e`(z!2 I]@w80/)PjWhפ )֣@Ǫ DU*LjeTP|)YBҪ&I8!NoKQvI}:K sRI{7sHWR(k9\碪#$+&@;ciK7dXT;;>8ɱʓ{#ŠkY!ͰtȮ݌L#+-1ٲs9:񹂼$J¸cJ䥲ϳհ'vy3G[xp-Q pa[.&^{aW[  s~kƥ,F( IPX/膏6|-+d;ցc!]8I"lFtpj5F7AP.1W Uy74JxcqƝ2/]wx2~V!H@q'Ywfkv^ :2oV&V!''w~ V|5GjzX̥Itƕݭu5ZN۲ÖM,^#>&~ 2MZ_ ͆Irr1[q ܻO.q\ #5?F',梍'IN|aBXn_]pIY e FryI;#a]iplONC ۓj'p4ǃ3A.Zdq\ I #]RTᵙnM6K p+p+p+p+p+p+p+p+p+7P;񇋏Z~*r۫ʊ~B˨U sS4^^^fzYME縷{臔ɴxPN$*!5tWL.X&LN!aghvO>Bk>xHsC~z p*6=~kʫÎ<)1Ԁ?]ɂ8tF QrsNfhթt~(+~w*Ո$k*[`ń'ms>DUVok=T0rS秆w ^BQjpXcGqv1}G=7,s(G "Vs㺚oZvِ9+C*zo=`Uq5OWL.Z8zUv/- bS!klBF9}u?܇Œ-vOFސHAJm/vi.l4vvɥ0GFfƉh(J62.*l%9Kry*4<0qv}} FjbMWbMUDK|@?C>^o$6C } q4'V?jN<$߄ϵ %EE͐7l=fm(ͧ?XCAph?Nx? rf*9u-J9hW+ v@kۣ|nOC}:n EKFv2Ktx<&ybBhA MWEj7qQà0bGѮF=iQW¢t[Y KcF&ҶgʴuvU&*I!ޛܶRG#c EF_B>DF\=.yhIZkg#?;*>b]6CPR9vOdDci 0pCclq PEyѣw"Jk/3ahsۓE}2lWabuhQu:D`[*<nDγ'cl1J:cnhc^ֵ]O l&%:O!gݪJ7>Ԋ yA¿xb-ݮqn!]P؅mtwWBz~U&>EɉL'2] qrmn.KUXkYofx E(8C[ȼ`k1A& 5ϕQIEdfTFXfhkĕC1=pد]kqv{vvf](ooi@k/䰁ՍWU")>$֤4cH]zjK \; 1AdL_^K_N8{Y|^>{-X̎[Ym 17>9-ʯ}pj:-GӨ|Gfl=UK*=U$" D%'l.:EgIFBt^Jr25k~ +96I屏/Cp p _I,ވhZ)nb#1a:*c7K\h [dQkѺʒ* S͉ovb yT^RJ^| &>OT`3BWGi&ex_iv'\#,]( #ÅNʌt:fu ߇]|h g.ۤ8}:"JJQ2IaF:!q1bjDg3<SapH'8U!q~ԼpuML]~v\ƴ~a[.4|N;|idR,hij VIdž3* }|K'`\-mlJD2:Z:j2]lɊh;"ZN9Ak%3j"9 :6w7qCƦe2C-HdžS DM5bQ48<ߜu:fzjcwϮ+9M:b5dSR~PzSswG6F]k:cVl%CG|isI(糘.*}/֋JX,S圉F''lE^\SA%o=Urx߁GxEb&bDq0(^$HW &3^g@d8V^Z!Y %% b[! Yme4ⰜZzjYi[8 *1je}p9j[+m]e;ν4Z?J*/_[ 4EXRݪꮙBujpk%|DʶֱnoŇV!|KБ4?bf((jn$B G"oX̧YʾD;YL-؍=*c4D+t?1C,;Co$ʄCt7[ƨ$-Bܠ%:I45DΞ'¥? 3me;]qVW Wc&d?h+VnKe Jsylg=XŁU1jGX]>w& ,]g:n!HE5-NbTd;/TmiX"XG)II;Qs+sL'RuwbVd.mExڟQsB}%:|쫄N6C;KMႸ_]O.WY\;7[[[[[[[[[[/R~s?y0%}`goT= $GYƌ]om֞K O۝`#Hў¼9[YO_**>;VTCKSZSz 3ΤӰpk K'tv'Љ:2簛BۿNтɴv5ٮȅ+.||qaKV%?Ɨ^N>알>y0mHUV3?m1/=G˵pZi|"tv'w:DOv;cly iv-{DŽ#%_Gdvߢv87+_:7٣1m5sjOMzi F8[s98e% -ٟ?YE3vCֲ]O7@BBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBBx{D^Sch?L5z ѱS?c.SW|Y wc=Bd)e\yKYjD!7 QQgIa92iNB:+{xG'v) 4(> 9:TlcG [ҐQlG cCo=aZՠ c{ez'VDI"16u_RWGP[tQu)bKC-Z-Y\ؓu cè s U!v!%BBG8katB18oBr>džߴ{0q8~jYV2 m#6,[5},\jiz[;+32}/CcEJZEw&IzӵcI!Ǟ|t}?3*](Ѧdwb;60d|t!,K֗XwHӻ'wFu7V,xY45aU[dF0Y-`S}9q߅_ OaU"%M<)WܘJՂ=kxfcɂr85MnHǖ!{֕ۢlk:Fu7VE?𐏅aʁs93lUԱJ鳍B?fk82j?_W.X̣s ^(Z[WJkGqW䄉's4ejp6~ڲwH~ m"zO)nw3λ{:? iUO3& -9X{L6՚R_82j? %Ĩ˄чv!u]G-ҝL؆Ikx2+qLGS#k^(YYZYOo7{@qGz7Vb$O_Ub㉕"YBvtcJշ=qfoA7>lPN?v Au|ڡutz'Q85zm]^O:뉃wRJ7tY= M݌/[-;+<]Cθi2to`>֚%Hp eH-[,-ƴm& ,JlHoX"u3.tO:+SpQ,l w)et0RTYBF9) so}ǦKy̬DBSpePO:ŭUykG͉Zk3~8Q2Wi NLc{ZC,Kѭu;4%ʶGrjɕ3Ofn^_z+sɾe9zwh n嬷.TI:<DŽCЇᤛX ]keJ!:S錟K}*Ն~Y|,. ][>rq1ֱJ=S|B,{`eȜ?O9RO+sήf˼?zb=5;!ޞQτ/ū.X%Yı oc [YW֝Xޛzz4}F,L;;A'J_.y>Bi-m: )bQ0f|vI^HiEk;0X6}((w"e٨HGLT'qSѝJQ.V0X,缕/Bs=?C!Db(7 85v.i~3CAs@k(8a&Q'ʵe|_Vsgle,^Y1:WZ9sv톈@Ǐ|X{)*{O㥇__"~&-<:c/ v|;elvg1{uՉ4_tĿ$Џ5=k"VxLϱ0'o<>۳ +Ike;'Y橨Ѻ9i,4g2QvL!dqjOs"צ 5{ .(I8.pg|V/pn_'͞sC$yr6$dˋ}LJfVcb έ|ٕ,c;P$#/.EP|ɚ盢HR?}jY Drj\V|X Py3p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p+p<.u(>חCGCxAנB*oaS|? \'A(>A(>A(>A(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>V(>Fݷ>h#IENDB`BodyText , ,PrvImagePrvTextDocOptions Y , ,Scripts , ,JScriptVersion R DefaultJScriptO_LinkDocS Section0\ Scripts , ,JScriptVersion R DefaultJScriptO_LinkDocS Section0\ <><> <2023YDij ȐY Y > <>< > [ij |] * (2Lj) - Annealing (ij 0x Б Al2O3/Si3N4 passivation 5 1 l - OPO \T Gatelp *  (4Lj) - Ɛ5 )D \ Dysprosium ijQ HfO2 ɹX ƌ  p \ l - <Հ i t$<| \ U  !"#$%&'()*+,-./0123456789:;<=>?@ABDEFGHIJLMNPQTUVWXYZ[]^_`abcdefghijklmnopqrstuvwxyz{|}~